ISSN 0914-4935
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

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Vol. 30 No. 4(1)
Special Issue on Open Collaboration for MEMS

Guest Editor: Masayoshi Esashi (Tohoku University)

Preface

  • Micro-electromechanical systems (MEMS) has been developed for sensors and other systems since 1971 at Tohoku University. Ion-sensitive FET (ISFET) probes made by micromachining were commercializ ... Read More

  • In this paper, “Open Collaboration” is defined as research and development (R&D) in a value/supply chain composed of different organizations including companies, universities and research ins ... Read More

  • The hands-on-access fabrication facility for MEMS at Tohoku University is an open facility for every engineer working to develop MEMS devices. The fab is located at Jun-ichi Nishizawa Memorial R ... Read More

  • In this paper, the technology and business activities of MEMS-CORE, which was established in 2001 as a venture company of Tohoku University, will be reviewed. MEMS-CORE is successfully maintaini ... Read More

  • The Trillion Sensors (TSensors) Initiative was started in 2013 in the US alongside the global economic tide of the Internet of things (IoT) to pursue a society in which trillion sensors are conne ... Read More

  • In this paper, we summarize research activities and technology progress in the field of current CMOS-MEMS resonators and oscillators for the portable sensor node and timing applications. By emplo ... Read More

  • Gas sensors based on resonant microcantilevers have drawn significant attention in the application of trace molecule detection. In order to realize the practical application of microcantilever-b ... Read More

  • More and more smart components and smart integrated systems enter into diverse innovative products and applications. They are key components and key technologies for industry 4.0 as well as Inte ... Read More

  • New MEMS devices are usually invented by academics having a goal of advancing technology and knowledge in their field. Along the way, market opportunities are often found, and then a new goal ar ... Read More


S&M1530

30th Commemorative Article

S&M1530
Wafer-level Packaging, Equipment Made in House, and Heterogeneous Integration
Masayoshi Esashi
pp. 683-691
https://doi.org/10.18494/SAM.2018.1638
Published on April 13, 2018
PDF (open access)

S&M1531

Perspective of Special Issue

S&M1531
Faster and More Cost-Effective Way to Success in MEMS R&D by Open Collaboration in Tohoku University
Shuji Tanaka
pp. 693-699
https://doi.org/10.18494/SAM.2018.1914
Published on April 13, 2018
PDF (open access)

S&M1532

Perspective of Special Issue

S&M1532
Accelerating MEMS Development by Open Collaboration at Hands-On-Access Fab, Tohoku University
Kentaro Totsu, Masaaki Moriyama, Yukio Suzuki, and Masayoshi Esashi
pp. 701-711
https://doi.org/10.18494/SAM.2018.1804
Published on April 13, 2018
PDF (open access)

S&M1533

Perspective of Special Issue

S&M1533
Development Services of MEMS-CORE
Koji Homma
pp. 713-722
https://doi.org/10.18494/SAM.2018.1799
Published on April 13, 2018
PDF (open access)

S&M1534

Perspective of Special Issue

S&M1534
Trillion Sensors and MEMS
Susumu Kaminaga
pp. 723-731
https://doi.org/10.18494/SAM.2018.1814
Published on April 13, 2018
PDF (open access)

S&M1535

Review Paper of Special Issue

S&M1535
CMOS-MEMS Resonators and Oscillators : A Review
Chao-Yu Chen, Ming-Huang Li, and Sheng-Shian Li
pp. 733-756
https://doi.org/10.18494/SAM.2018.1857
Published on April 13, 2018
PDF (open access)

S&M1536

Research Paper of Special Issue

S&M1536
Gas Sensing System Composed of IC-Foundry-Compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing
Xin Peng, Yanqing Lv, Pengcheng Xu, Xinxin Li, Haitao Yu, and Jiaqiang Xu
pp. 757-766
https://doi.org/10.18494/SAM.2018.1798
Published on April 13, 2018
PDF (open access)

S&M1537

Review Paper of Special Issue

S&M1537
Integrated Microsystems for Smart Applications
Thomas Otto, Steffen Kurth, Sven Voigt, Andreas Morschhauser, Marco Meinig, Karla Hiller, Joerg Martin, and Martina Vogel
pp. 767-778
https://doi.org/10.18494/SAM.2018.1797
Published on April 13, 2018
PDF (open access)

S&M1538

Perspective of Special Issue

S&M1538
Translational Engineering: Best Practices in Developing MEMS for Volume Manufacturing
Alissa M. Fitzgerald, Keith M. Jackson, Charles C. Chung, and Carolyn D. White
pp. 779-789
https://doi.org/10.18494/SAM.2018.1843
Published on April 13, 2018
PDF (open access)

Cover of this Issue





Forthcoming Regular Issues


Forthcoming Special Issues

5th Special Issue on the Workshop of Next-generation Front-edge Optical Science Research
Guest editor, Hidehito Nanto (Kanazawa Institute of Technology) and Takayuki Yanagida (Nara Institute of Science and Technology)


Special Issue on the International Multi-Conference on Engineering and Technology Innovation 2018 (IMETI2018)
Guest editor, Wen-Hsiang Hsieh (National Formosa University)
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Special Issue on Materials, Devices, Circuits, Analytical Methods for Various Sensors (Selected Papers from ICSEVEN 2018) (2)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Chi-Chih Liao (II-V Epiworks, Inc.), and Ja-Hao Chen (Feng Chia University)
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Special Issue on Smart Connections and Intelligent Computation in IoT
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Special Issue on AUTO2018
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Special Issue on Food-Sensing Technologies and Applications
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Special Issue on Universal Power Supply Technologies for Trillion Sensors Era
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Special Issue on Graphene-Based Sensors
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Special Issue on Advanced Nanofabrication Processes for Emerging Devices and Materials
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Special Issue on Magnetic Sensors and Applications
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Special Issue on Sensors and Materials in Manufacturing
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Special Issue on CMOS-driven Biomedical Innovations
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Special Issue on New Trend of Robotics and Applications
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Special Issue on Smart Sensing Technology and Materials for Smart Industry and Environmental Applications
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Special Issue on Environmental Sensing
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Special Issue on Sensor Fusion and Environment Perception for Autonomous Systems
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Special Issue on Remote Sensing and Geospatial Technologies for Sustainable Development
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Special Issue on International Conference on BioSensors, BioElectronics, BioMedical Devices, BioMEMS/NEMS and Applications 2018/2019 (Bio4Apps 2018/2019)
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Special Issue on Advanced Materials on Electronic and Mechanical Devices and their Application on Sensors
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Special Issue on Advanced Micro and Nanomaterials for various Sensor Applications (Selected Papers from ICASI 2019)
Guest editor, Sheng-Joue Young (National Formosa University), Shoou-Jinn Chang (National Cheng Kung University), Liang-Wen Ji (National Formosa University), and Yu-Jen Hsiao (Southern Taiwan University of Science and Technology)
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Special Issue on Innovation in Smart Sensing Control, Metrology, Optimization and Intelligent Automation
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Special Issue on Materials, Devices, Circuits, Analytical Methods for Various Sensors (Selected Papers from ICSEVEN 2019)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Cheng-Hsing Hsu (National United University), Ja-Hao Chen (Feng Chia University), and Wei-Ling Hsu (Huaiyin Normal University)
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Special Issue on Biological Odor Sensing System and Their Applications
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Special Issue on Software, Algorithms, and Applications Using Sensors and Networks
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Special Issue on Novel Sensing Technologies for Point of Care, Home Care, and Personal Health Care
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Special Issue on Advances in Shape Memory Materials
Guest editor, Ryosuke Matsui (Aichi Institute of Technology) and Hiroyuki Miki (Tohoku University)
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