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Sensors and Materials, Volume 31, Number 12(2) (2019)
Copyright(C) MYU K.K.
pp. 4079-4092
S&M2071 Research Paper of Special Issue
Published in advance: November 15, 2019
Published: December 16, 2019

Two-degree-of-freedom Piezoelectric MEMS Energy Harvester Based on Bulk PZT Film [PDF]

Gang Tang, Gaoyang Xie, Bo Huang, Bin Xu, Zhibiao Li, Xiaoxiao Yan, Dandan Yuan, and Wenjing Wu

(Received July 31, 2019; Accepted October 10, 2019)

Keywords: piezoelectric energy harvester, two-degree-of-freedom, MEMS, bulk PZT film

In this paper, we propose a low-frequency (<100 Hz) piezoelectric MEMS energy harvester (PMEH) with a two-degree-of-freedom (2DOF) structure to work in two vibration modes for broadband operation. The PMEH is fabricated by bonding a piezoelectric ceramic lead zirconate titanate Pb(Zr,Ti)O3 (PZT) to phosphor bronze, which can work in a high-acceleration ambient with good durability. The maximum open-circuit voltage and output power of the PMEH are 23.6 V and 64.69 μW at the first resonant frequency of 27.4 Hz when the input vibration acceleration is 2 g (9.8 m/s2), while they are 14 V and 56.75 μW at the second resonant frequency of 93.4 Hz when the input vibration acceleration is 8 g, respectively. The fabricated PMEH scavenged the vibration energy of a vacuum compression pump and an ultrasonic cleaner and generated maximum output powers of 10.45 and 16.59 μW, respectively. The experimental results show that the device has good environmental adaptability.

Corresponding author: Gang Tang

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Cite this article
Gang Tang, Gaoyang Xie, Bo Huang, Bin Xu, Zhibiao Li, Xiaoxiao Yan, Dandan Yuan, and Wenjing Wu, Two-degree-of-freedom Piezoelectric MEMS Energy Harvester Based on Bulk PZT Film, Sens. Mater., Vol. 31, No. 12, 2019, p. 4079-4092.

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