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Sensors and Materials
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Sensors and Materials, Volume 31, Number 9(2) (2019)
Copyright(C) MYU K.K.
S&M1980 Research Paper of Special Issue
Published: September 20, 2019
Improvement of Detection Limit of Nanomechanical Deflection Using Optical Interferometry for Label-free Molecular Detection [PDF]
Satoshi Maruyama, Yong Joon Choi, Kazuhiro Takahashi, and Kazuaki Sawada
(Received December 27, 2018; Accepted July 17, 2019)
Keywords: Fabry–Perot interferometric sensor, MEMS, optical, biosensor, antigen–antibody reaction
Herein, we report an improved minimum detectable displacement on a surface stress biosensor using optical interferometry, allowing for the detection of a low biomarker concentration via antigen–antibody reaction. The sensor is composed of a submicron-thick freestanding polymethyl methacrylate (PMMA)/parylene-C membrane on a polydimethylsiloxane (PDMS) substrate with a microcavity to generate optical interference. The cavity structure was fabricated by transferring the submicron-thick bilayer to the highly adhesive PDMS substrate. The detection of human serum albumin antigen at a concentration of 1 pg/mL was achieved by antigen–antibody reaction using simultaneous optical and electrical measurements. In addition, the minimum detectable displacement of the optical interferometric surface stress sensor was determined to be 42.6 pm, representing an 11.7-fold improvement compared with conventional cantilever-based surface stress sensors.
Corresponding author: Kazuhiro Takahashi
This work is licensed under a Creative Commons Attribution 4.0 International License.
Cite this article
Satoshi Maruyama, Yong Joon Choi, Kazuhiro Takahashi, and Kazuaki Sawada, Improvement of Detection Limit of Nanomechanical Deflection Using Optical Interferometry for Label-free Molecular Detection, Sens. Mater., Vol. 31, No. 9, 2019, p. 2895-2906.
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