ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

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 Sensors and Materials
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Vol. 31 No. 9(2)
Special Issue on Design, Fabrication, Characterization, and Application of MEMS

Guest Editor: Hiroyuki Fujita (Tokyo City University)

Preface

  • We develop an equivalent circuit model for a MEMS vibrational energy harvester that uses electrets or permanent electrical charges to generate electrostatic induction currents from mechanical vib ... Read More

  • This paper presents the design and optimization of planar poly-Si thermoelectric generators (TEGs) for energy harvesting application. Temperature and electric potential distributions are simulat ... Read More

  • The fabrication of sharp tips manufactured using silicon or using a silicon mold is a widely used method with a wide range of applications. In this paper, we extend our work on the fabrication o ... Read More

  • A large set of micro and nanodevices requires hybrid vacuum packaging at the wafer-level to optimize their performances and lifetime. When the temperature of the packaging fabrication process is ... Read More

  • In this paper, a sliding electrical contact with an electroconductive liquid is presented. We have proposed a sliding contact using a combination of an electroconductive liquid and a dipped prob ... Read More

  • Valve metal oxide (anodized oxide) is used in a mirrored configuration to serve as self-limiting dielectric layers of electrowetting-on-dielectric (EWOD) devices. Resembling nonpolar electrolyti ... Read More

  • Micro-electromechanical systems (MEMS) tweezers developed for the trapping and characterization of bio molecules such as DNA are also capable of cell handling, which will enable further applicati ... Read More

  • In this paper, we present a highly sensitive micro-electromechanical system (MEMS) accelerometer for sub-mG sensing resolution, where the thermomechanical noise (i.e., Brownian noise, BN) being i ... Read More

  • Herein, we report an improved minimum detectable displacement on a surface stress biosensor using optical interferometry, allowing for the detection of a low biomarker concentration via antigen ... Read More

  • The first overseas laboratory of the Institute of Industrial Science (IIS), the University of Tokyo, SMMiL-E, Seeding Microsystems in Medicine in Lille–European Japanese Technologies against Ca ... Read More


S&M1972

Research Paper of Special Issue

S&M1972
Analytical Model for MEMS Electret Energy Harvester with Long-stroke Tip-sliding Electrodes
Yukiya Tohyama, Hiroaki Honma, Brieux Durand, Tatsuhiko Sugiyama, Gen Hashiguchi, and Hiroshi Toshiyoshi
pp. 2779-2802
https://doi.org/10.18494/SAM.2019.2388
Published on September 20, 2019
PDF (open access)

S&M1973

Research Paper of Special Issue

S&M1973
Design of Planar Si Thermoelectric Generators with Phononic Crystal Patterning
Masahiro Nomura, Ryoto Yanagisawa, Peter Zimmermann, Patrick Ruther, and Oliver Paul
pp. 2803-2810
https://doi.org/10.18494/SAM.2019.2297
Published on September 20, 2019
PDF (open access)

S&M1974

Research Paper of Special Issue

S&M1974
Ultrasharp High-aspect-ratio Tetrahedral Molded Tips
Rolf Vermeer, Erwin Berenschot, Edin Sarajlic, and Niels Tas
pp. 2811-2823
https://doi.org/10.18494/SAM.2019.2255
Published on September 20, 2019
PDF (open access)

S&M1975

Review Paper of Special Issue

S&M1975
Effect of Environment on Activation and Sorption of Getter Alloys and Multilayers for Hybrid Wafer-level Vacuum Packaging
Alain Bosseboeuf, Sylvain Lemettre, Ming Wu, Johan Moulin, Philippe Coste, Clément Bessouet, Sana Hammami, Charles Renard, and Laetitia Vincent
pp. 2825-2849
https://doi.org/10.18494/SAM.2019.2312
Published on September 20, 2019
PDF (open access)

S&M1976

Research Paper of Special Issue

S&M1976
Sliding Contact Using Electroconductive Liquid and Its Application to Low-physical-restriction Micropotentiometer
Satoshi Konishi
pp. 2851-2860
https://doi.org/10.18494/SAM.2019.2246
Published on September 20, 2019
PDF (open access)

S&M1977

Research Paper of Special Issue

S&M1977
Counterbalanced Valve Metal Oxide as a Reliable Dielectric Layer for Electrowetting-on-dielectric Devices
Supin Chen and Chang-Jin “CJ” Kim
pp. 2861-2872
https://doi.org/10.18494/SAM.2019.2449
Published on September 20, 2019
PDF (open access)

S&M1978

Research Paper of Special Issue

S&M1978
Optimization of Surface Treatment on MEMS Probes for Single-cell Capture and Release
Kensaku Hayashi, Momoko Kumemura, Shohei Kaneda, Vivek Menon, Laurent Jalabert, Saeko Tachikawa, Mehmet C. Tarhan, Teruo Fujii, Beomjoon Kim, and Hiroyuki Fujita
pp. 2873-2881
https://doi.org/10.18494/SAM.2019.2322
Published on September 20, 2019
PDF (open access)

S&M1979

Research Paper of Special Issue

S&M1979
A MEMS Accelerometer for Sub-mG Sensing
Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Hiroyuki Ito, and Kazuya Masu
pp. 2883-2894
https://doi.org/10.18494/SAM.2019.2122
Published on September 20, 2019
PDF (open access)

S&M1980

Research Paper of Special Issue

S&M1980
Improvement of Detection Limit of Nanomechanical Deflection Using Optical Interferometry for Label-free Molecular Detection
Satoshi Maruyama, Yong Joon Choi, Kazuhiro Takahashi, and Kazuaki Sawada
pp. 2895-2906
https://doi.org/10.18494/SAM.2019.2247
Published on September 20, 2019
PDF (open access)

S&M1981

Perspective of Special Issue

S&M1981
SMMiL-E, Japanese Bio-MEMS Laboratory in France, and the Role of Scientific Direction
Teru Okitsu, Eric Leblanc, Dominique Collard, and Hiroyuki Fujita
pp. 2907-2916
https://doi.org/10.18494/SAM.2019.2375
Published on September 20, 2019
PDF (open access)

Cover of this Issue





Forthcoming Regular Issues


Forthcoming Special Issues

Special Issue on Advanced Materials on Electronic and Mechanical Devices and their Application on Sensors (5)
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Cheng-Fu Yang (National University of Kaohsiung)


Special Issue on Advances in Shape Memory Materials
Guest editor, Ryosuke Matsui (Aichi Institute of Technology) and Hiroyuki Miki (Tohoku University)


Special Issue on Perceptual Deep Learning in Computer Vision and its Application
Guest editor, Chih-Hsien Hsia (National Ilan University)


Special Issue on Materials, Devices, Circuits, and Analytical Methods for Various Sensors (3)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Cheng-Hsing Hsu (National United University), Ja-Hao Chen (Feng Chia University), and Wei-Ling Hsu (Huaiyin Normal University)
Conference website


Special Issue on Sensing Technologies and Their Applications (1)
Guest editor, Rey-Chue Hwang (I-Shou University)
Call for paper


Special Issue on New Trends in Smart Sensor Systems
Guest editor, Takahiro Hayashi (Kansai University)
Call for paper


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