ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded
(Clarivate Analytics), Scopus
(Elsevier), and other databases.
Instructions to authors
Instructions for manuscript preparation
Sensors and Materials
Bunkyo-ku, Tokyo 113-0022, Japan
Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
(proofreading and recording)
The Art of Writing Scientific Papers
(How to write scientific papers)
Sensors and Materials, Volume 31, Number 9(2) (2019)
Copyright(C) MYU K.K.
S&M1979 Research Paper of Special Issue
Published: September 20, 2019
A MEMS Accelerometer for Sub-mG Sensing [PDF]
Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Hiroyuki Ito, and Kazuya Masu
(Received August 29, 2018; Accepted December 10, 2018)
Keywords: MEMS, accelerometer, thermomechanical noise, Au, multilayer metal technology
In this paper, we present a highly sensitive micro-electromechanical system (MEMS) accelerometer for sub-mG sensing resolution, where the thermomechanical noise (i.e., Brownian noise, BN) being inversely proportional to a proof mass has to be below 1 µG/√Hz (gravity acceleration G = 9.8 m/s2). To increase the proof mass, we propose the use of multiple-layered metal developed by Au electroplating. We then show an approach to design the spring constant for the MEMS accelerometer. A multilayer metal structure is used for serpentine flexures to suspend the high-density proof mass, which also enables us to obtain a high degree of freedom for the spring constant design without compromising the performance of the MEMS accelerometer. A proof-of-concept device has been fabricated, and the measured characteristics are consistent with the design values. The BN of the developed device is experimentally evaluated to be 22 nG/√Hz, which is one or more orders of magnitude lower than those of conventional MEMS accelerometers with the same capacitance sensitivity. The evaluation results confirm that the proposed device has potential for sub-mG sensing.
Corresponding author: Daisuke Yamane
This work is licensed under a Creative Commons Attribution 4.0 International License.
Cite this article
Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Hiroyuki Ito, and Kazuya Masu, A MEMS Accelerometer for Sub-mG Sensing, Sens. Mater., Vol. 31, No. 9, 2019, p. 2883-2894.
Forthcoming Regular Issues
Forthcoming Special Issues
Special Issue on Sensors and Materials in Manufacturing
Guest editor, Ming Yang (Tokyo Metropolitan University) and Masao Murakawa (Nippon Institute of Technology)Special Issue on Remote Sensing and Geospatial Technologies for Sustainable Development (1)
Guest editor, Dong Ha Lee and Tri Dev Acharya (Kangwon National University)Special Issue on Selected Papers from AUTO2018 and IS3C2018 (2)
Guest editor, Hsiung-Cheng Lin (National Chin-Yi University of Technology)Special Issue on New Trend of Robotics and Applications
Guest editor, Ikuo Yamamoto (Nagasaki University)Special Issue on Remote Sensing and Geospatial Technologies for Sustainable Development (2)
Guest editor, Dong Ha Lee and Tri Dev Acharya (Kangwon National University)Special Issue on Universal Power Supply Technologies for Trillion Sensors Era
Guest editor, Keiji Takeuchi (NTT Data Institute of Management Consulting, Inc.)Special Issue on CMOS-driven Biomedical Innovations
Guest editor, Kiichi Niitsu (Nagoya University)Call for paperSpecial Issue on Smart Sensing Technology and Materials for Smart Industry and Environmental Applications
Guest editor, Somyot Kaitwanidvilai (King Mongkut’s Institute of Technology Ladkrabang)Special Issue on Sensor Fusion and Environment Perception for Autonomous Systems
Guest editor, Chenguang Yang (University of the West of England, Bristol)Call for paperSpecial Issue on International Conference on BioSensors, BioElectronics, BioMedical Devices, BioMEMS/NEMS and Applications 2018/2019 (Bio4Apps 2018/2019)
Guest editor, Xiaojun Han (Harbin Institute of Technology)Conference websiteCall for paperSpecial Issue on Environmental Sensing
Guest editor, Hiroshi Aoki and Tetsuya Nakazato (National Institute of Advanced Industrial Science and Technology, AIST)Call for paperSpecial Issue on Advanced Materials on Electronic and Mechanical Devices and their Application on Sensors
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Cheng-Fu Yang (National University of Kaohsiung)Call for paperSpecial Issue on Advanced Micro and Nanomaterials for various Sensor Applications (Selected Papers from ICASI 2019)
Guest editor, Sheng-Joue Young (National Formosa University), Shoou-Jinn Chang (National Cheng Kung University), Liang-Wen Ji (National Formosa University), and Yu-Jen Hsiao (Southern Taiwan University of Science and Technology)Conference websiteCall for paperSpecial Issue on Innovation in Smart Sensing Control, Metrology, Optimization and Intelligent Automation
Guest editor, Cheng-Chi Wang (National Chin-Yi University of Technology)Conference websiteCall for paperSpecial Issue on Materials, Devices, Circuits, Analytical Methods for Various Sensors (Selected Papers from ICSEVEN 2019)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Cheng-Hsing Hsu (National United University), Ja-Hao Chen (Feng Chia University), and Wei-Ling Hsu (Huaiyin Normal University)Conference websiteCall for paperSpecial Issue on Biological Odor Sensing System and Their Applications
Guest editor, Takeshi Sakurai (Tokyo University of Agriculture)Call for paperSpecial Issue on Software, Algorithms, and Applications Using Sensors and Networks
Guest editor, Yoshito Tobe (Aoyama Gakuin University)Call for paperSpecial Issue on Novel Sensing Technologies for Point of Care, Home Care, and Personal Health Care
Guest editor, Yu-Lin Wang (National Tsing Hua University)Call for paperSpecial Issue on Advances in Shape Memory Materials
Guest editor, Ryosuke Matsui (Aichi Institute of Technology) and Hiroyuki Miki (Tohoku University)Call for paperSpecial Issue on Sensing in Medical Robots
Guest editor, Kenji Kawashima (Tokyo Medical and Dental University)Call for paperSpecial Issue on Optical Sensors: Novel Materials, Approaches, and Applications
Guest editor, Yap Wing Fen (Universiti Putra Malaysia)Call for paperSpecial Issue on New Trends in Smart Sensor Systems
Guest editor, Takahiro Hayashi (Kansai University)Call for paperSpecial Issue on Sensing Technologies and Their Applications
Guest editor, Rey-Chue Hwang (I-Shou University)Call for paperSpecial Issue on On-Site Energy
Guest editor, Hiroki Kuwano (Tohoku University)Call for paper