S&M Young Researcher Paper Award 2020
Recipients: Ding Jiao, Zao Ni, Jiachou Wang, and Xinxin Li [Winner's comments]
Paper: High Fill Factor Array of Piezoelectric Micromachined
Ultrasonic Transducers with Large Quality Factor

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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials, Volume 30, Number 12(2) (2018)
Copyright(C) MYU K.K.
pp. 2919-2926
S&M1729 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2018.1840
Published: December 18, 2018

Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer [PDF]

Motohiro Takayasu, Ippei Tsuji, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu

(Received December 6, 2017; Accepted January 5, 2018)

Keywords: microgravity generation, tilting board, resolution evaluation, MEMS accelerometer

We describe microgravity generation and the resolution evaluation results of a sub-1-mG microelectromechanical system (MEMS) accelerometer (1 G = 9.8 m/s2). To realize input acceleration below 1 mG, we show the principle of generating microgravity acceleration by adjusting the tilt angle. The change in acceleration induced by a tilting board is quantitatively analyzed, and the capacitance change of the MEMS accelerometer as a function of tilt angle is measured. The analytical results show that the tilting board has the potential to generate microgravity. The experimental results reveal that the sub-1-mG MEMS accelerometer can realize the detection of sub-1-mG-level acceleration.

Corresponding author: Motohiro Takayasu


Cite this article
Motohiro Takayasu, Ippei Tsuji, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu, Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer, Sens. Mater., Vol. 30, No. 12, 2018, p. 2919-2926.



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