S&M Young Researcher Paper Award 2020
Recipients: Ding Jiao, Zao Ni, Jiachou Wang, and Xinxin Li [Winner's comments]
Paper: High Fill Factor Array of Piezoelectric Micromachined
Ultrasonic Transducers with Large Quality Factor

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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials, Volume 32, Number 10(3) (2020)
Copyright(C) MYU K.K.
pp. 3343-3354
S&M2343 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2020.2918
Published: October 30, 2020

Positional Regulation of Electrostatic Micro-electromechanical Actuator via Adaptive Two-stage Sliding Mode Control [PDF]

Chi-Hsin Yang, Kun-Chieh Wang, and Long Wu

(Received March 31, 2020; Accepted August 7, 2020)

Keywords: micro-electromechanical (MEM) actuator, positional regulation, adaptive, sliding mode control

In this study, we examine an adaptive two-stage sliding mode control scheme for an electrostatically actuated micro-electromechanical (MEM) actuator. The objective of the control scheme is to regulate the position of the movable plate in the MEM actuator by voltage control. For accurate measurements of system states, direct detection is possible by means of an existing sensing technique. Two main steps are applied to design the closed-loop control system. Firstly, for the dynamical model of the MEM actuator, a normalized time-scale approach and a nonlinear state transformation are introduced. Then, the adaptive two-stage sliding mode control is designed to achieve the control goal. The stability of the closed-loop control is proven and numerical studies to verify the control scheme are also performed.

Corresponding author: Kun-Chieh Wang


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Cite this article
Chi-Hsin Yang, Kun-Chieh Wang, and Long Wu, Positional Regulation of Electrostatic Micro-electromechanical Actuator via Adaptive Two-stage Sliding Mode Control, Sens. Mater., Vol. 32, No. 10, 2020, p. 3343-3354.



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