Notice of retraction
Vol. 32, No. 8(2), S&M2292

ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

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Positional Regulation of Electrostatic Micro-electromechanical Actuator via Adaptive Two-stage Sliding Mode Control

Chi-Hsin Yang, Kun-Chieh Wang, and Long Wu

(Received March 31, 2020; Accepted August 7, 2020)

Keywords: micro-electromechanical (MEM) actuator, positional regulation, adaptive, sliding mode control

In this study, we examine an adaptive two-stage sliding mode control scheme for an electrostatically actuated micro-electromechanical (MEM) actuator. The objective of the control scheme is to regulate the position of the movable plate in the MEM actuator by voltage control. For accurate measurements of the system states, direct detection is possible by means of an existing sensing technique. Two main steps are applied to design the closed-loop control system. Firstly, for the dynamical model of the MEM actuator, a normalized time-scale approach and a nonlinear state transformation are introduced. Then, the adaptive two-stage sliding mode control is designed to achieve the control goal. The stability of the closed-loop control is proven and numerical studies to verify the control scheme are also performed.

Corresponding author: Kun-Chieh Wang




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