S&M Young Researcher Paper Award 2020
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Paper: High Fill Factor Array of Piezoelectric Micromachined
Ultrasonic Transducers with Large Quality Factor

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Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
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Sensors and Materials, Volume 32, Number 7(3) (2020)
Copyright(C) MYU K.K.
pp. 2503-2515
S&M2278 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2020.2875
Published: July 31, 2020

Piezoelectric Polymer Multilayer Coating Method for Vibration Energy Harvester [PDF]

Nobuaki Kuriyama, Takashi Nakajima, Ryo Ichige, and Takaaki Suzuki

(Received March 19, 2020; Accepted May 7, 2020)

Keywords: piezoelectric, polymer, multilayer coating, P(VDF/TrFE), vibration energy harvester, MEMS

In this research, we propose a piezoelectric polymer multilayer coating method by solution casting and spin coating to improve the fabrication yield and piezoelectricity of the vibration energy harvester (VEH). The proposed multilayer coating method improves the smoothness of the surface of the piezoelectric layer and the device fabrication yield. To confirm the validity of the proposed coating method, we fabricated and compared four types of VEHs with different numbers of piezoelectric layers coated on a Cu/polyimide film. As a result of the evaluation, the piezoelectric characteristics and the fabrication yield of the coated film were found to be improved with increasing number of coating layers. In addition, because of the decrease in the film thickness per coating, the amount of output power generated by the fabricated piezoelectric VEH (PVEH) was increased.

Corresponding author: Takaaki Suzuki


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Cite this article
Nobuaki Kuriyama, Takashi Nakajima, Ryo Ichige, and Takaaki Suzuki, Piezoelectric Polymer Multilayer Coating Method for Vibration Energy Harvester, Sens. Mater., Vol. 32, No. 7, 2020, p. 2503-2515.



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