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Vol. 32, No. 8(2), S&M2292

ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
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Sensors and Materials, Volume 32, Number 6(3) (2020)
Copyright(C) MYU K.K.
pp. 2215-2226
S&M2252 Research Paper of Special Issue
Published: June 30, 2020

Open-loop Spectrum Analyzer Integrated Circuit for Nanoresonator Sensing [PDF]

Hyunwoo Heo, Kwonsang Han, Hyungseup Kim, Jaesung Kim, Donggeun You, Yongsu Kwon, Hyunjoong Lee, Yil suk Yang, and Hyoungho Ko

(Received April 16, 2019; Accepted March 5, 2020)

Keywords: on-chip spectrum analyzer, nanoresonator, motional resistance, Butterworth–Van Dyke equivalent circuit, resistive sensitivity, lumped-parameter model

A nanoresonator can be applied as a biochemical sensor based on the change in the mass of the nanoresonator, and the mass change can be interpreted in the frequency domain. In this paper, we present an open-loop spectrum analyzer integrated circuit (IC) for a nanoresonator. The circuit determines the frequency characteristics of a nanoresonator, such as quality factor (Q-factor) and resonant frequency, and detects minute resistance changes of the nanoresonator that result in changes in Q-factor or resonant frequency. The proposed nanoresonator driver circuit is implemented using an open-loop system, and to characterize the open-loop frequency response of the nanoresonator, the IC includes a voltage-controlled oscillator, a transimpedance amplifier, and a 16-bit delta-sigma analog-to-digital converter. To compensate for the parasitic components that cause the distortions of the phase and magnitude response, a shunt-capacitance cancelling amplifier is used to cancel the effect of the shunt-parasitic capacitance of the nanoresonator. The simulated target nanoresonator is modeled using the Butterworth–Van Dyke equivalent circuit model with a resonant frequency of 10 MHz. The proposed nanoresonator driver circuit is fabricated using a standard 0.18 μm complementary metal oxide semiconductor process with an active area of 2.346 mm2. The simulated resistive sensitivity of the IC is 5.1 mV/kΩ.

Corresponding author: Hyoungho Ko

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Cite this article
Hyunwoo Heo, Kwonsang Han, Hyungseup Kim, Jaesung Kim, Donggeun You, Yongsu Kwon, Hyunjoong Lee, Yil suk Yang, and Hyoungho Ko, Open-loop Spectrum Analyzer Integrated Circuit for Nanoresonator Sensing, Sens. Mater., Vol. 32, No. 6, 2020, p. 2215-2226.

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