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Sensors and Materials, Volume 31, Number 11(2) (2019)
Copyright(C) MYU K.K.
pp. 3517-3526
S&M2027 Research Paper of Special Issue
Published: November 15, 2019

Determination of the Refractive Index of Molybdenum Using a Spectrophotometric Method [PDF]

Donyau Chiang, Po-Kai Chiu, Yu-Chen Hsieh, Wen-Tse Hsiao, and Shih-Feng Tseng

(Received April 15, 2019; Accepted September 4, 2019)

Keywords: refractive index, extinction coefficient, spectrophotometry, molybdenum, simulation

The refractive indexes of thin films are determined by spectrophotometric measurement in the ultraviolet-to-near-infrared spectral range on a high-absorption metal, molybdenum, as an example. In our theoretical derivative, the refractive indexes of a substrate with and without low absorption are calculated first and then that of the combined film stack is calculated. Both solutions are obtained by the Newton–Raphson iteration method. The calculated refraction index is 1.64–2.88 and the extinction coefficient is 2.76–4.52, which are within the measured ranges for the Mo film. Both indexes increase monotonically with the wavelength in the visible and near-infrared ranges.

Corresponding author: Po-Kai Chiu

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Cite this article
Donyau Chiang, Po-Kai Chiu, Yu-Chen Hsieh, Wen-Tse Hsiao, and Shih-Feng Tseng, Determination of the Refractive Index of Molybdenum Using a Spectrophotometric Method, Sens. Mater., Vol. 31, No. 11, 2019, p. 3517-3526.

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