ISSN 0914-4935

Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Sensors and Materials,
Volume 30, Number 5(2) (2018)

Copyright(C) MYU K.K. All Rights Reserved.
pp. 1123-1132
S&M1569
https://doi.org/10.18494/SAM.2018.1836
Published: May 31, 2018

Nitric Oxide Gas Sensors Using Multilayered Thin Film with Interspaces [PDF]

Akihiro Shimizu, Tsubasa Morita, Tomiharu Yamaguchi, and Kazuhiro Hara

(Received December 4, 2017; Accepted April 10, 2018)

Keywords: NO gas sensor, WO3 thin film, Ag catalyst, interspace, multiple-layered configuration

Nitric oxide (NO) is an air pollutant known to adversely affect the environment, humans, and other living organisms. Low-level NO gas is also created by human bodies and emitted as a component of exhaled breath and skin gas under some health conditions. Therefore, there is a strong demand for the monitoring of NO gas concentration. In this paper, we present novel NO gas sensors that have been developed using multilayered WO3-based thin films with interspaces. Ag doping into a WO3 thin film is effective in increasing the sensitivity to NO. Multilayered thin-film sensors with interspaces successfully enhance both sensitivity and selectivity to NO. The developed sensor with quadruple-layered sensing films can detect as low as 0.5 ppm NO gas with good selectivity at an operating temperature of 290 ℃. The response and recovery times are 81 and 138 s, respectively, for the double-layered sensor, while its sensitivity is lower than that of the quadruple-layered sensor. Thus, the sensors are promising as a portable and inexpensive NO sensing device in various application fields such as environmental monitoring and health diagnosis.

Corresponding author: Tomiharu Yamaguchi


Cite this article
Akihiro Shimizu, Tsubasa Morita, Tomiharu Yamaguchi, and Kazuhiro Hara, Nitric Oxide Gas Sensors Using Multilayered Thin Film with Interspaces, Sens. Mater., Vol. 30, No. 5, 2018, p. 1123-1132.


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