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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials, Volume 30, Number 5(2) (2018)
Copyright(C) MYU K.K.
pp. 1063-1071
S&M1563 Research Paper of Special Issue
Published: May 31, 2018

Optimal Design of Support for a Planoconvex Quartz Resonator [PDF]

Jing Ji, Meng Zhao, Hiroshi Oigawa, and Toshitsugu Ueda

(Received December 1, 2017; Accepted May 9, 2018)

Keywords: quartz resonator, plano-convex, optimal design, support, energy trapping

In this paper, we report the optimal design of a support for a fundamental-type plano-convex AT-cut quartz resonator which was fabricated using our newly developed etching process. We established a three-dimensional finite element model and carried out eigen-frequency analysis. To describe quantitatively the energy trapping performance of the resonator, we introduced a parameter called the energy trapping rate, which is defined by the ratios of the vibration energy inside to that outside of the electrode region. Two types of our newly designs were evaluated in this work, and the optimal one providing large energy trapping rate was determined. Based on the calculated results, we fabricated resonators and measured their Q-factors. The calculation and experiment results show an improvement in the efficiency of resonator performance. High Q-factors were also obtained.

Corresponding author: Jing Ji

Cite this article
Jing Ji, Meng Zhao, Hiroshi Oigawa, and Toshitsugu Ueda, Optimal Design of Support for a Planoconvex Quartz Resonator, Sens. Mater., Vol. 30, No. 5, 2018, p. 1063-1071.

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