pp. 349-358
S&M378 Research Paper of Special Issue Published: 1999 Ultralow-Stress Silicon-Rich Nitride Films for Microstructure Fabrication [PDF] Ming-Cheng Cheng, Chin-Piao Chang, Wen-Sheh Huang and Ruey-Shing Huang Cite this article Ming-Cheng Cheng, Chin-Piao Chang, Wen-Sheh Huang and Ruey-Shing Huang, Ultralow-Stress Silicon-Rich Nitride Films for Microstructure Fabrication, Sens. Mater., Vol. 11, No. 6, 1999, p. 349-358. |