pp. 57-68
S&M225 Review Paper Published: 1996 Micromachined Sensors Using Polysilicon Sacrificial Layer Etching Technology [PDF] Osamu Tabata, Keiichi Shimaoka, Ryouji Asahi and Susumu Sugiyama Cite this article Osamu Tabata, Keiichi Shimaoka, Ryouji Asahi and Susumu Sugiyama, Micromachined Sensors Using Polysilicon Sacrificial Layer Etching Technology, Sens. Mater., Vol. 8, No. 1, 1996, p. 57-68. |