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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
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MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 27, Number 2 (2015)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 217-227
S&M1059 Research Paper https://doi.org/10.18494/SAM.2015.1060 Published: March 12, 2015 SiO2/SiN Multilayer-Stack Infrared Absorber Integrated on Pb(Zr0.4,Ti0.6)O3 Film Pyroelectric Sensors on γ-Al2O3/Si Substrate [PDF] Koji Oishi, Shota Yonemaru, Daisuke Akai and Makoto Ishida (Received September 11, 2014; Accepted November 25, 2014) Keywords: γ-Al2O3, Pb(Zr,Ti)O3, pyroelectric sensor, infrared absorber
In this study, Pb(Zr0.4,Ti0.6)O3 (PZT) film pyroelectric infrared sensors were fabricated on a Si substrate with a SiO2/SiN multilayer-stack infrared (IR) absorber and characterized. Since an IR absorber is a critical element that determines the sensitivity of IR sensors, we have proposed a multilayer-stack IR absorber based on complementary metal-oxide-semiconductor (CMOS) compatible materials for the PZT film pyroelectric sensor. We designed and fabricated a SiO2/SiN multilayer-stack IR absorber that possesses a broad and high IR absorptance in the wavelength range from 8 to 14 µm. The thicknesses of the SiO2 and SiN films were designed as 550 and 850 nm, respectively, according to the calculation result of absorptance in the multilayer films. The SiO2/SiN multilayer-stack absorber was integrated on PZT film sensors by plasma-enhanced chemical vapor deposition, and 86% average IR absorptance was obtained in the wavelength range from 8 to 14 µm. A specific detectivity of 1.15 × 107 cmHz0.5/W was achieved at 30 Hz on the PZT film pyroelectric sensor.
Corresponding author: Koji Oishi Cite this article Koji Oishi, Shota Yonemaru, Daisuke Akai and Makoto Ishida, SiO2/SiN Multilayer-Stack Infrared Absorber Integrated on Pb(Zr0.4,Ti0.6)O3 Film Pyroelectric Sensors on γ-Al2O3/Si Substrate, Sens. Mater., Vol. 27, No. 2, 2015, p. 217-227. |
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