pp. 303-314
S&M451 Research Paper of Special Issue Published: 2001 Anisotropic Etching of Silicon on {111} and Near {111} Planes [PDF] Songsheng Tan, Robert Boudreau and Michael L. Reed Cite this article Songsheng Tan, Robert Boudreau and Michael L. Reed, Anisotropic Etching of Silicon on {111} and Near {111} Planes, Sens. Mater., Vol. 13, No. 5, 2001, p. 303-314. |