pp. 503-517
S&M349 Research Paper Published: 1998 Micromachined Hot Plate Test Structures to Measure the Heat Capacity of CMOS IC Thin Films [PDF] Martin von Arx, Luca Plattner, Oliver Paul and Henry Baltes Cite this article Martin von Arx, Luca Plattner, Oliver Paul and Henry Baltes, Micromachined Hot Plate Test Structures to Measure the Heat Capacity of CMOS IC Thin Films, Sens. Mater., Vol. 10, No. 8, 1998, p. 503-517. |