pp. 127-144
S&M76 Research Paper Published: 1991 Compensating Corner Undercutting of (100) Silicon in KOH [PDF] H. L. Offereins, H. Sandmaier, K. Marusczyk, K. Kühl and A. Plettner Cite this article H. L. Offereins, H. Sandmaier, K. Marusczyk, K. Kühl and A. Plettner, Compensating Corner Undercutting of (100) Silicon in KOH, Sens. Mater., Vol. 3, No. 3, 1991, p. 127-144. |