pp. 207-216
S&M51 Research Paper Published: 1990 Polycrystalline Silicon Carbide Films For Piezoresistive Elements [PDF] Yoshiharu Onuma, Kiichi Kamimura, Yoshihiro Nagura, Cai Hao Yi and Mitsuhiro Kiuchi Cite this article Yoshiharu Onuma, Kiichi Kamimura, Yoshihiro Nagura, Cai Hao Yi and Mitsuhiro Kiuchi, Polycrystalline Silicon Carbide Films For Piezoresistive Elements, Sens. Mater., Vol. 2, No. 4, 1990, p. 207-216. |