pp. 17-26
S&M34 Research Paper Published: 1990 A CMOS Thermally Isolated Gas Flow Sensor [PDF] M. Parameswaran, A. M. Robinson, Lj. Ristic, K. Chau and W. Allegretto Cite this article M. Parameswaran, A. M. Robinson, Lj. Ristic, K. Chau and W. Allegretto, A CMOS Thermally Isolated Gas Flow Sensor, Sens. Mater., Vol. 2, No. 1, 1990, p. 17-26. |