ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

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 Sensors and Materials
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Vol. 31 No. 8(2)
Special Issue on Advanced Nanofabrication Processes for Emerging Devices and Materials

Guest Editor: Hiroyuki Akinaga (National Institute of Advanced Industrial Science and Technology, AIST)

Preface

  • Advanced nanofabrication technologies have fostered a manufacturing revolution in various industrial fields. Technological capabilities previously were owned only by researchers and large compan ... Read More

  • In this paper, we report on the impact of sample preparation methods on the adhesion reproducibility of thin films, considering future applications of supercritical fluid deposition (SCFD) to MEM ... Read More

  • The sol–gel technique is a major deposition method of lead zirconate titanate (PZT), because of its good uniformity and simplicity. At present, different PZT sols are commercially available, a ... Read More

  • We have quantitatively investigated a periodic nanostructure exposure process by electron beam lithography (EBL). The targeted applications are nano- to micro-electromechanical systems (NEMS/MEM ... Read More

  • In this study, we propose a solidified ionic liquid with a 3D microstructure to increase its surface area for the performance enhancement of a vibration energy harvester (VEH). By soft lithograp ... Read More

  • Nanoscale sensing applications require significant usage of power which can be achieved through efficient management of omnipresent heat. The spin Seebeck effect (SSE) is rather fresh energy har ... Read More

  • The Support Laboratory of Nanofabrication of Yamaguchi University is a member of the Nanofabrication Platform Consortium in the Nanotechnology Platform Japan. Our laboratory features the desorpti ... Read More

  • An IoT force sensor module was fabricated and demonstrated in a five-day practical program for students, as part of the Nanotechnology Platform Japan project. The module mainly consists of a sili ... Read More


S&M1949

Letter of Special Issue

S&M1949
Nanofabrication Technologies for All
Hiroyuki Akinaga
pp. 2477-2480
https://doi.org/10.18494/SAM.2019.2521
Published on August 19, 2019
PDF (open access)

S&M1950

Research Paper of Special Issue

S&M1950
Influence of Pretreatment on Adhesion Quality of Supercritical-fluid-deposited Cu Film on Si
Naoto Usami, Etsuko Ota, Takeshi Momose, Akio Higo, and Yoshio Mita
pp. 2481-2496
https://doi.org/10.18494/SAM.2019.2316
Published on August 19, 2019
PDF (open access)

S&M1951

Research Paper of Special Issue

S&M1951
Sol–Gel Deposition and Characterization of Lead Zirconate Titanate Thin Film Using Different Commercial Sols
Masaaki Moriyama, Kentaro Totsu, and Shuji Tanaka
pp. 2497-2509
https://doi.org/10.18494/SAM.2019.2420
Published on August 19, 2019
PDF (open access)

S&M1952

Research Paper of Special Issue

S&M1952
Experimental Comparison of Rapid Large-area Direct Electron Beam Exposure Methods with Plasmonic Devices
Akio Higo, Tomoki Sawamura, Makoto Fujiwara, Eric Lebrasseur, Ayako Mizushima, Etsuko Ota, and Yoshio Mita
pp. 2511-2525
https://doi.org/10.18494/SAM.2019.2443
Published on August 19, 2019
PDF (open access)

S&M1953

Research Paper of Special Issue

S&M1953
Fabrication of Solidified Ionic Liquid with 3D Microstructures and Its Application to Vibration Energy Harvester
Taiki Iida, Takuya Tsukamoto, Kazumoto Miwa, Shimpei Ono, and Takaaki Suzuki
pp. 2527-2539
https://doi.org/10.18494/SAM.2019.2309
Published on August 19, 2019
PDF (open access)

S&M1954

Research Paper of Special Issue

S&M1954
Spin Seebeck Effect in Neodymium Iron Garnet Multilayers
Shashank Tyagi, Taito Maeda, Keisuke Kimura, Surbhi Gupta, Kengo Kishimoto, Tsuyoshi Koyanagi, Hironori Asada, and Yasuhiro Fukuma
pp. 2541-2546
https://doi.org/10.18494/SAM.2019.2335
Published on August 19, 2019
PDF (open access)

S&M1955

Research Paper of Special Issue

S&M1955
Development of Operand Desorption Gas Analysis System
Hiroki Kurisu, Takayuki Kimura, Setsuo Yamamoto, and Tetsuo Higuchi
pp. 2547-2554
https://doi.org/10.18494/SAM.2019.2338
Published on August 19, 2019
PDF (open access)

S&M1956

Research Paper of Special Issue

S&M1956
Fabrication of IoT Force Sensor Module in Five-day Program for Students as Part of Nanotechnology Platform Japan Project
Kentaro Totsu, Masaaki Moriyama, Hiraku Watanabe, Toshiyuki Kikuta, Masahiro Hemmi, Masaaki Shoji, Takashi Yoshida, and Masataka Tatsuta
pp. 2555-2563
https://doi.org/10.18494/SAM.2019.2390
Published on August 19, 2019
PDF (open access)

Cover of this Issue





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Special Issue on Selected Papers from IS3C2018 and AUTO2018 (1)
Guest editor, Hsiung-Cheng Lin (National Chin-Yi University of Technology)


Special Issue on Design, Fabrication, Characterization, and Application MEMS
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Special Issue on Selected Papers from IS3C2018 and AUTO2018 (2)
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Special Issue on Advanced Materials on Electronic and Mechanical Devices and their Application on Sensors
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Special Issue on Advanced Micro and Nanomaterials for various Sensor Applications (Selected Papers from ICASI 2019)
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Special Issue on Materials, Devices, Circuits, Analytical Methods for Various Sensors (Selected Papers from ICSEVEN 2019)
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Special Issue on Novel Sensing Technologies for Point of Care, Home Care, and Personal Health Care
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Special Issue on Advances in Shape Memory Materials
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Special Issue on Sensing in Medical Robots
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Special Issue on Optical Sensors: Novel Materials, Approaches, and Applications
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