ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

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English    日本語

Instructions for manuscript preparation
English    日本語

Template
English

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 MYU K.K.
 Sensors and Materials
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Vol. 15 No. 2
Special Issue on Physical Chemistry of Wet Etching of Silicon (2)

Guest Editor: Kazuo Sato (Nagoya University)



S&M509

Research Paper of Special Issue

S&M509
Dependence of the Anisotropy of Wet Chemical Etching of Silicon on the Amount of Surface Coverage by OH Radicals
Miguel A. Gosálvez, Adam S. Foster and Risto M. Nieminen
PDF

S&M510

Research Paper of Special Issue

S&M510
Modelling of Anisotropic Etching of Silicon: Anomalies due to Facet Boundary Effects
Ziyad Elalamy, Leslie M. Landsberger, Mojtaba Kahrizi, Anand Pandy, Irina Stateikina and Sébastien Michel
PDF

S&M511

Research Paper of Special Issue

S&M511
Anisotropic Si Etching Condition for Preparing Optically Smooth Surfaces
Minoru Sasaki, Takehiro Fujii and Kazuhiro Hane
PDF

S&M512

Research Paper of Special Issue

S&M512
Difference in Activated Atomic Steps on (111) Silicon Surface during KOH and TMAH Etching
Kazuo Sato, Takehiro Masuda and Mitsuhiro Shikida
PDF

S&M513

Research Paper of Special Issue

S&M513
Effects of Mask Misalignment and Wafer Misorientation on Silicon V-Groove Etching
Songsheng Tan, Robert Boudreau and Michael L. Reed
PDF

Cover of this Issue





Forthcoming Regular Issues


Forthcoming Special Issues

Special Issue on Advanced Materials on Electronic and Mechanical Devices and their Application on Sensors (5)
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Cheng-Fu Yang (National University of Kaohsiung)


Special Issue on Advances in Shape Memory Materials
Guest editor, Ryosuke Matsui (Aichi Institute of Technology) and Hiroyuki Miki (Tohoku University)


Special Issue on Sensing Technologies and Their Applications (1)
Guest editor, Rey-Chue Hwang (I-Shou University)
Call for paper


Special Issue on Perceptual Deep Learning in Computer Vision and its Application
Guest editor, Chih-Hsien Hsia (National Ilan University)


Special Issue on Materials, Devices, Circuits, and Analytical Methods for Various Sensors (3)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Cheng-Hsing Hsu (National United University), Ja-Hao Chen (Feng Chia University), and Wei-Ling Hsu (Huaiyin Normal University)
Conference website


Special Issue on New Trends in Smart Sensor Systems
Guest editor, Takahiro Hayashi (Kansai University)
Call for paper


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