ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

Instructions to authors
English    日本語

Instructions for manuscript preparation
English    日本語

Template
English

Publisher
 MYU K.K.
 Sensors and Materials
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 Tel: 81-3-3827-8549
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Vol. 13 No. 6
Special Issue on Physical Chemistry of Wet Etching of Silicon (2)

Guest Editor: Henri Camon (CNRS/LAAS)



S&M452

Research Paper of Special Issue

S&M452
Realistic Step Flow Model for Orientation-Dependent Wet Etching Implemented in a Modular TCAD Environment
Anton Horn, Franz Wittmann and Gerhard Wachutka
PDF

S&M453

Research Paper of Special Issue

S&M453
The Structure of an Underetched Convex Mask Corner Explained as the Evolution of a Saddlepoint Vertex
Jaap van Suchtelen and Erik van Veenendaal
PDF

S&M454

Research Paper of Special Issue

S&M454
Monte Carlo Simulation of Wet Chemical Etching of Silicon
Erik van Veenendaal, Jaap van Suchtelen, Paul van Beurden, Herma M. Cuppen, Willem J. P. van Enckevort, A. Jasper Nijdam, Miko Elwenspoek and Elias Vlieg
PDF

S&M455

Research Paper of Special Issue

S&M455
Application of Dual-Doped TMAH Silicon Etchant in the Fabrication of a Micromachined Aluminum Flexing Beam Actuator
John Garra, Sebastiano Brida, Lorenza Ferrario and Makarand Paranjape
PDF

S&M456

Research Paper

S&M456
Optochemical Sensor for HCl Gas Based on Tetraalkoxyphenylporphyrin Dispersed in an Acrylate Polymer Matrix
Heru Supriyatno, Katsuhiko Nakagawa and Yoshihiko Sadaoka
PDF

Cover of this Issue





Forthcoming Regular Issues


Forthcoming Special Issues

Special Issue on Advanced Materials on Electronic and Mechanical Devices and their Application on Sensors (5)
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Cheng-Fu Yang (National University of Kaohsiung)


Special Issue on Advances in Shape Memory Materials
Guest editor, Ryosuke Matsui (Aichi Institute of Technology) and Hiroyuki Miki (Tohoku University)


Special Issue on Perceptual Deep Learning in Computer Vision and its Application
Guest editor, Chih-Hsien Hsia (National Ilan University)


Special Issue on Materials, Devices, Circuits, and Analytical Methods for Various Sensors (3)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Cheng-Hsing Hsu (National United University), Ja-Hao Chen (Feng Chia University), and Wei-Ling Hsu (Huaiyin Normal University)
Conference website


Special Issue on Sensing Technologies and Their Applications (1)
Guest editor, Rey-Chue Hwang (I-Shou University)
Call for paper


Special Issue on New Trends in Smart Sensor Systems
Guest editor, Takahiro Hayashi (Kansai University)
Call for paper


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