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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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English 日本語
Instructions for manuscript preparation
English 日本語
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English
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MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
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The Art of Writing Scientific Papers
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 21, Number 7 (2009)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 373-383
S&M777 Research Paper of Special Issue https://doi.org/10.18494/SAM.2009.603 Published: October 22, 2009 Fabrication of Carbon Nanotube Via Interconnects at Low Temperature and Their Robustness over a High-Density Current [PDF] Shintaro Sato, Akio Kawabata, Tatsuhiro Nozue, Daiyu Kondo, Tomo Murakami, Takashi Hyakushima, Mizuhisa Nihei and Yuji Awano (Received June 1, 2009; Accepted June 8, 2009) Keywords: carbon nanotube, LSI, interconnect, via, growth, low temperature, catalyst, nanoparticle, particle, impactor
We fabricated carbon nanotube (CNT) via interconnects (vertical wiring) and evaluated their robustness over a high-density current. Multiwalled carbon nanotubes (MWNTs) were grown at temperatures as low as 365°C using Co catalyst nanoparticles, which were formed and deposited by a custom-designed particle generation and deposition system. MWNTs were successfully grown in via holes with a diameter as small as 40 nm. The resistance of CNT vias with a diameter of 160 nm was found to be of the same order as that of tungsten plugs. The CNT vias were able to sustain a current density as high as 5.0×106 A/cm2 at 105°C for 100 h without any deterioration in their properties.
Corresponding author: Shintaro Sato Cite this article Shintaro Sato, Akio Kawabata, Tatsuhiro Nozue, Daiyu Kondo, Tomo Murakami, Takashi Hyakushima, Mizuhisa Nihei and Yuji Awano, Fabrication of Carbon Nanotube Via Interconnects at Low Temperature and Their Robustness over a High-Density Current, Sens. Mater., Vol. 21, No. 7, 2009, p. 373-383. |
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- A Prototype Portable Voltammetric Sensor for Determining Titratable Acidity of Sake and Moromi
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Keita Murai, Hiroki Yamaguchi, Satoru Furuuchi, Kazutoshi Takahashi, Uno Tagami, Moemi Tatsumi, Toshimi Mizukoshi, Hiroshi Miyano, Shuntaro Okauchi, and Masayuki Sugiki - Development of Portable Multi-fluorescence Detection System Using Indium Tin Oxide Heater for Loop-mediated Isothermal Amplification
Ryo Ishii, Sota Hirose, Shoji Yamamoto, Kazuhiro Morioka, Akihide Hemmi, and Hizuru Nakajima - Reproduction of Absorption Spectra of Bromothymol Blue–Methyl Red Mixed Indicator from RGB and L*a*b* Color Coordinates and Application to Fast Spectrum Acquisition
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- A Prototype Portable Voltammetric Sensor for Determining Titratable Acidity of Sake and Moromi
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Trung Tin Tran, Phuoc Thao Vo Du, Anh Hao Huynh Vo, and Trung Nghia Tran - Optimal Prediction of Effectiveness of Mangrove Forest Against Coastal Erosion: Case Study of Coastal Area along the Gulf of Thailand
Puangpet Rattanarama, Chalida U-tapao, Yoshimichi Yamamoto, and Arj-ong Nopmuang
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