S&M Young Researcher Paper Award 2020
Recipients: Ding Jiao, Zao Ni, Jiachou Wang, and Xinxin Li [Winner's comments]
Paper: High Fill Factor Array of Piezoelectric Micromachined
Ultrasonic Transducers with Large Quality Factor

S&M Young Researcher Paper Award 2021
Award Criteria
Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

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Published in advance: December 27, 2021

Gas Sensor Array with Polymer-Carbon Glue Composite Structures for Neural Network Application [PDF]

Bo-Chun Yang and Yu-Jen Hsiao

(Received May 18, 2021; Accepted December 6, 2021)

Keywords: gas sensor, sensor array, volatile organic compounds, neural network, stacked composite membranes

In this study, we focus on the gas sensor array with semiconductor and neural network applications. Two different sensing membranes, namely, diluted conductive water-soluble carbon glue and polymer-carbon glue stacked membranes, were used for experiments to compare the differences and correlations between multiple polymers and multiple gases. In the experiments, the reactions of 13 different polymers with five gases (air, ethanol, CO, NO2, NH3) were tested. A set of sixteen array sensors with a line width of 50 µm and a sensing diameter of 3 mm were used, which were coated with a 300-nm-thick aluminum-doped zinc oxide (AZO) layer on the wafer surface. The gas sensitivity using various polymers dripped on the sensing area was tested, and the sensitivity of small low-energy heterogeneous gas-sensing elements is discussed. It is concluded that the various gas groups have good separation properties and have excellent selectivity and reproducibility. Among the two different sensing membranes, the gas reaction ratio of (ΔR/R)max = 149% is the most prominent relative to the resistance of carbon glue in reference to the air baseline; as a result, the carbon membrane showed a higher gas sensitivity than the polymer-carbon membrane.

Corresponding author: Yu-Jen Hsiao




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