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Vol. 34, No. 8(3), S&M3042

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
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Sensors and Materials, Volume 33, Number 4(1) (2021)
Copyright(C) MYU K.K.
pp. 1113-1126
S&M2521 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2021.3004
Published in advance: January 19, 2021
Published: April 6, 2021

Design and Fabrication of Quartz MEMS-based Monolithic Vibrating Beam Accelerometer [PDF]

Jinxing Liang, Qi Tang, and Shengshou Lin

(Received September 24, 2020; Accepted January 11, 2021)

Keywords: quartz, vibrating beam accelerometer, monolithic, high sensitivity

We present a novel monolithic quartz vibrating beam accelerometer (QVBA), which is mainly composed of a single-beam resonator, a base-proof mass structure, and a vibration isolation frame. The sensor measures the acceleration signal perpendicular to the proof mass surface, which is transferred into an inertial force through the proof mass. We attempted to improve the sensing structure configuration to enhance the sensitivity and suppress cross-axis sensitivity. A two-step wet etching process was successfully developed to fabricate the designed sensor, and a simple self-excitation oscillation circuit was designed to drive the fabricated accelerometer. The static measurement result demonstrated high sensitivity of about 54.46 Hz/g, and the bias stability was evaluated to be 33 μg (1σ). In the temperature range from −40 to 60 ℃, the bias frequency shift was below 1.9 ppm/℃.

Corresponding author: Jinxing Liang


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Cite this article
Jinxing Liang, Qi Tang, and Shengshou Lin, Design and Fabrication of Quartz MEMS-based Monolithic Vibrating Beam Accelerometer, Sens. Mater., Vol. 33, No. 4, 2021, p. 1113-1126.



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