S&M Young Researcher Paper Award 2020
Recipients: Ding Jiao, Zao Ni, Jiachou Wang, and Xinxin Li [Winner's comments]
Paper: High Fill Factor Array of Piezoelectric Micromachined
Ultrasonic Transducers with Large Quality Factor

S&M Young Researcher Paper Award 2021
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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials, Volume 33, Number 4(1) (2021)
Copyright(C) MYU K.K.
pp. 1113-1126
S&M2521 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2021.3004
Published in advance: January 19, 2021
Published: April 6, 2021

Design and Fabrication of Quartz MEMS-based Monolithic Vibrating Beam Accelerometer [PDF]

Jinxing Liang, Qi Tang, and Shengshou Lin

(Received September 24, 2020; Accepted January 11, 2021)

Keywords: quartz, vibrating beam accelerometer, monolithic, high sensitivity

We present a novel monolithic quartz vibrating beam accelerometer (QVBA), which is mainly composed of a single-beam resonator, a base-proof mass structure, and a vibration isolation frame. The sensor measures the acceleration signal perpendicular to the proof mass surface, which is transferred into an inertial force through the proof mass. We attempted to improve the sensing structure configuration to enhance the sensitivity and suppress cross-axis sensitivity. A two-step wet etching process was successfully developed to fabricate the designed sensor, and a simple self-excitation oscillation circuit was designed to drive the fabricated accelerometer. The static measurement result demonstrated high sensitivity of about 54.46 Hz/g, and the bias stability was evaluated to be 33 μg (1σ). In the temperature range from −40 to 60 ℃, the bias frequency shift was below 1.9 ppm/℃.

Corresponding author: Jinxing Liang


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Cite this article
Jinxing Liang, Qi Tang, and Shengshou Lin, Design and Fabrication of Quartz MEMS-based Monolithic Vibrating Beam Accelerometer, Sens. Mater., Vol. 33, No. 4, 2021, p. 1113-1126.



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