Notice of retraction
Vol. 32, No. 8(2), S&M2292

ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

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Published in advance: January 19, 2021

Design and Fabrication of Quartz MEMS-based Monolithic Vibrating Beam Accelerometer [PDF]

Jinxing Liang, Qi Tang, and Shengshou Lin

(Received September 24, 2020; Accepted January 11, 2021)

Keywords: quartz, vibrating beam accelerometer, monolithic, high sensitivity

We present a novel monolithic quartz vibrating beam accelerometer, which is mainly composed of a single-beam resonator, a base-proof mass structure, and a vibration isolation frame. The sensor measures the acceleration signal perpendicular to the proof mass surface, which is transferred into an inertial force through the proof mass. We attempted to improve the sensing structure configuration to enhance the sensitivity and suppress cross-axis sensitivity. A two-step wet etching process was successfully developed to fabricate the designed sensor, and a simple self-excitation oscillation circuit was designed to drive the fabricated accelerometer. The static measurement result demonstrated high sensitivity of about 54.46 Hz/g, and the bias stability was evaluated to be 33 μg (1σ). In the temperature range from −40 to 60 ℃, the bias frequency shift was below 1.9 ppm/℃.

Corresponding author: Jinxing Liang




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