Notice of retraction
Vol. 32, No. 8(2), S&M2292

ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

Instructions to authors
English    日本語

Instructions for manuscript preparation
English    日本語

Template
English

Publisher
 MYU K.K.
 Sensors and Materials
 1-23-3-303 Sendagi,
 Bunkyo-ku, Tokyo 113-0022, Japan
 Tel: 81-3-3827-8549
 Fax: 81-3-3827-8547

MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.


MYU Research

(proofreading and recording)


MYU K.K.
(translation service)


The Art of Writing Scientific Papers

(How to write scientific papers)
(Japanese Only)

Copyright(C) MYU K.K.

Relationship between Thermal Stability and Structure of MEMS Cantilevers Embedded in an Elastomer

Toshihiro Takeshita, Natsumi Makimoto, Takeshi Kobayashi, and Seiichi Takamatsu

(Received April 30, 2020; Accepted July 22, 2020)

Keywords: MEMS, force sensor, cantilever, thermal endurance, PDMS

The thermal stability of a microelectromechanical system (MEMS) cantilever force sensor embedded in an elastomer was examined. When mounting the cantilever on an electronic substrate using solder reflow at 250 ℃ the elastomer expands against the back of the cantilever. The expansion often breaks the cantilever. The effects of the cantilever thickness and width on the breaking strength and the stress concentration points were simulated with finite element methods and the results agreed well with experimental results. This work is expected to improve the thermal stability of MEMS cantilever force sensors by optimizing their design.

Corresponding author: Toshihiro Takeshita




Forthcoming Regular Issues


Forthcoming Special Issues

Special Issue on Sensors and Materials: Emerging Investigators in Japan
Guest editor, Tsuyoshi Minami (The University of Tokyo)


Special issue on Novel Materials and Sensing Technologies on Electronic and Mechanical Devices (2)-1
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Hsien-Wei Tseng (Longyan University)


Special Issue on Materials, Devices, Circuits, and Analytical Methods for Various Sensors (4)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Cheng-Hsing Hsu (National United University), Ja-Hao Chen (Feng Chia University), and Wei-Ling Hsu (Huaiyin Normal University)
Conference website


Special issue on Novel Materials and Sensing Technologies on Electronic and Mechanical Devices (2)-2
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Hsien-Wei Tseng (Longyan University)


Special Issue on New Trends in Robots and Their Applications
Guest editor, Ikuo Yamamoto (Nagasaki University)


Special Issue on Artificial Intelligence in Sensing Technologies and Systems
Guest editor, Prof. Lin Lin (Dalian University of Technology)
Call for paper


Copyright(C) MYU K.K. All Rights Reserved.