ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

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Relationship between Thermal Stability and Structure of MEMS Cantilevers Embedded in an Elastomer

Toshihiro Takeshita, Natsumi Makimoto, Takeshi Kobayashi, and Seiichi Takamatsu

(Received April 30, 2020; Accepted July 22, 2020)

Keywords: MEMS, force sensor, cantilever, thermal endurance, PDMS

The thermal stability of a microelectromechanical system (MEMS) cantilever force sensor embedded in an elastomer was examined. When mounting the cantilever on an electronic substrate using solder reflow at 250 ℃ the elastomer expands against the back of the cantilever. The expansion often breaks the cantilever. The effects of the cantilever thickness and width on the breaking strength and the stress concentration points were simulated with finite element methods and the results agreed well with experimental results. This work is expected to improve the thermal stability of MEMS cantilever force sensors by optimizing their design.

Corresponding author: Toshihiro Takeshita




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