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Vol. 32, No. 8(2), S&M2292

ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials, Volume 32, Number 5(2) (2020)
Copyright(C) MYU K.K.
pp. 1797-1810
S&M2218 Research Paper
https://doi.org/10.18494/SAM.2020.2766
Published: May 20, 2020

A Drive Control Method for Silicon Micro-gyroscopes [PDF]

Fu Zhu, Junying Chen, Hua Guo, Mou Liu, and Shipeng Han

(Received January 6, 2020; Accepted March 19, 2020)

Keywords: silicon micro-gyroscope, second-order frequency-locked loop, third-order PLL, drive control

The tracking ability of a silicon micro-gyroscope in a highly dynamic environment is a key factor for MEMS and inertial technology. To improve the tracking ability in a highly dynamic environment, a new drive control method for silicon micro-gyroscopes is proposed. First, a double closed-loop system with a phase-locked loop (PLL) and an automatic gain control (AGC) is designed to track the resonant frequency and stabilize the output amplitude. Second, the framework and corresponding algorithm of a second-order frequency-locked loop (FLL)-assisted third-order PLL were designed. Thereafter, the tracking performance characteristics of a thirdorder PLL and the proposed second-order-FLL-assisted third-order PLL at different frequency differences were simulated in Matlab Simulink. Simulation results show that the second-order- FLL-assisted third-order PLL can track the resonant frequency in a shorter time with a higher precision than the third-order PLL, and that the proposed method can still lock the resonant frequency of 11570 Hz when the frequency difference increases to 400 Hz, demonstrating its applicability in highly dynamic environments. Finally, the digital application specific integrated circuit (ASIC) test platform further validates the effectiveness of our proposed drive control method.

Corresponding author: Junying Chen


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Cite this article
Fu Zhu, Junying Chen, Hua Guo, Mou Liu, and Shipeng Han, A Drive Control Method for Silicon Micro-gyroscopes, Sens. Mater., Vol. 32, No. 5, 2020, p. 1797-1810.



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