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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 32, Number 4(3) (2020)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 1567-1576
S&M2202 Research Paper https://doi.org/10.18494/SAM.2020.2732 Published: April 30, 2020 Waveguide-mode Sensor Chip with Si/SiO2/SiOx Structure [PDF] Masato Yasuura, Koji Ueno, Hiroki Ashiba, Yuki Nakaya, and Makoto Fujimaki (Received December 12, 2019; Accepted March 5, 2020) Keywords: microcrystalline silicon, near-field light enhancement, sputtering deposition, transfer matrix method, refractive index measurement
A waveguide-mode sensor detects changes in the complex refractive index on the surface
of a planar waveguide chip with high sensitivity. We developed a waveguide-mode sensor chip
with the Si/SiO2 structure. It was predicted from simulations that a third layer of high refractive
index added to the outermost surface of the planar waveguide may improve the sensitivity of
the waveguide-mode sensor. In this research, we designed and manufactured a borosilicate
glass substrate chip with a Si/SiO2/SiOx structure via sputtering deposition, and we improved
the sensitivity of the waveguide-mode sensor chip. The Si/SiO2/SiOx structure chip was
approximately 1.5 times more sensitive to refractive index changes than the Si/SiO2 structure
chip.
Corresponding author: Masato Yasuura  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Masato Yasuura, Koji Ueno, Hiroki Ashiba, Yuki Nakaya, and Makoto Fujimaki, Waveguide-mode Sensor Chip with Si/SiO2/SiOx Structure, Sens. Mater., Vol. 32, No. 4, 2020, p. 1567-1576. |
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