ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

Instructions to authors
English    日本語

Instructions for manuscript preparation
English    日本語


 Sensors and Materials
 1-23-3-303 Sendagi,
 Bunkyo-ku, Tokyo 113-0022, Japan
 Tel: 81-3-3827-8549
 Fax: 81-3-3827-8547

MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.

MYU Research

(proofreading and recording)

(translation service)

The Art of Writing Scientific Papers

(How to write scientific papers)
(Japanese Only)

Sensors and Materials, Volume 31, Number 9(1) (2019)
Copyright(C) MYU K.K.
pp. 2681-2689
S&M1965 Research Paper of Special Issue
Published: September 9, 2019

Acoustic Emission Monitoring System for Hard Polishing of Sapphire Wafer [PDF]

Chun-Wei Liu, Hong-Chang Chen, and Shih-Chieh Lin

(Received February 28, 2019; Accepted May 30, 2019)

Keywords: sapphire wafer, hard polishing, acoustic emission

In this study, an acoustic emission (AE) sensor is used to monitor the hard polishing process of a sapphire wafer. Since the AE sensor is very sensitive, a specially designed polishing head is used such that the AE sensor can be placed as close to the polishing area as possible. Then, hard polishing experiments are conducted to investigate the effects of hard polishing processing factors including pressure and rotational speed on the material removal rate (MRR) and root mean square (RMS) value of AE signals. According to the results, it is shown that the RMS value of AE signals strongly correlates with the MRR of the processes under various polishing conditions. On the basis of the experimental results, a mathematical model of MRR is developed. The coefficient of determination (R2) of the model is about 99%, the corrected coefficient of determination () is about 95%, and the prediction error is less than 12% in all cases studied. The results indicate that the AE sensor is a potential tool for monitoring the polishing process.

Corresponding author: Shih-Chieh Lin

Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 International License.

Cite this article
Chun-Wei Liu, Hong-Chang Chen, and Shih-Chieh Lin, Acoustic Emission Monitoring System for Hard Polishing of Sapphire Wafer, Sens. Mater., Vol. 31, No. 9, 2019, p. 2681-2689.

Forthcoming Regular Issues

Forthcoming Special Issues

Special Issue on Magnetic Sensors and Applications & Regular Issue
Guest editor, Keiji Tsukada (Okayama University)

Special Issue on Selected Papers from AUTO2018 and IS3C2018 (2)
Guest editor, Hsiung-Cheng Lin (National Chin-Yi University of Technology)

Special Issue on New Trend of Robotics and Applications
Guest editor, Ikuo Yamamoto (Nagasaki University)

Special Issue on Universal Power Supply Technologies for Trillion Sensors Era
Guest editor, Keiji Takeuchi (NTT Data Institute of Management Consulting, Inc.)

Special Issue on Sensors and Materials in Manufacturing
Guest editor, Ming Yang (Tokyo Metropolitan University) and Masao Murakawa (Nippon Institute of Technology)

Special Issue on Remote Sensing and Geospatial Technologies for Sustainable Development
Guest editor, Dong Ha Lee and Tri Dev Acharya (Kangwon National University)

Special Issue on CMOS-driven Biomedical Innovations
Guest editor, Kiichi Niitsu (Nagoya University)
Call for paper

Special Issue on Smart Sensing Technology and Materials for Smart Industry and Environmental Applications
Guest editor, Somyot Kaitwanidvilai (King Mongkut’s Institute of Technology Ladkrabang)

Special Issue on Sensor Fusion and Environment Perception for Autonomous Systems
Guest editor, Chenguang Yang (University of the West of England, Bristol)
Call for paper

Special Issue on International Conference on BioSensors, BioElectronics, BioMedical Devices, BioMEMS/NEMS and Applications 2018/2019 (Bio4Apps 2018/2019)
Guest editor, Xiaojun Han (Harbin Institute of Technology)
Conference website
Call for paper

Special Issue on Environmental Sensing
Guest editor, Hiroshi Aoki and Tetsuya Nakazato (National Institute of Advanced Industrial Science and Technology, AIST)
Call for paper

Special Issue on Advanced Materials on Electronic and Mechanical Devices and their Application on Sensors
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Cheng-Fu Yang (National University of Kaohsiung)
Call for paper

Special Issue on Advanced Micro and Nanomaterials for various Sensor Applications (Selected Papers from ICASI 2019)
Guest editor, Sheng-Joue Young (National Formosa University), Shoou-Jinn Chang (National Cheng Kung University), Liang-Wen Ji (National Formosa University), and Yu-Jen Hsiao (Southern Taiwan University of Science and Technology)
Conference website
Call for paper

Special Issue on Innovation in Smart Sensing Control, Metrology, Optimization and Intelligent Automation
Guest editor, Cheng-Chi Wang (National Chin-Yi University of Technology)
Conference website
Call for paper

Special Issue on Materials, Devices, Circuits, Analytical Methods for Various Sensors (Selected Papers from ICSEVEN 2019)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Cheng-Hsing Hsu (National United University), Ja-Hao Chen (Feng Chia University), and Wei-Ling Hsu (Huaiyin Normal University)
Conference website
Call for paper

Special Issue on Biological Odor Sensing System and Their Applications
Guest editor, Takeshi Sakurai (Tokyo University of Agriculture)
Call for paper

Special Issue on Software, Algorithms, and Applications Using Sensors and Networks
Guest editor, Yoshito Tobe (Aoyama Gakuin University)
Call for paper

Special Issue on Novel Sensing Technologies for Point of Care, Home Care, and Personal Health Care
Guest editor, Yu-Lin Wang (National Tsing Hua University)
Call for paper

Special Issue on Advances in Shape Memory Materials
Guest editor, Ryosuke Matsui (Aichi Institute of Technology) and Hiroyuki Miki (Tohoku University)
Call for paper

Special Issue on Sensing in Medical Robots
Guest editor, Kenji Kawashima (Tokyo Medical and Dental University)
Call for paper

Special Issue on Optical Sensors: Novel Materials, Approaches, and Applications
Guest editor, Yap Wing Fen (Universiti Putra Malaysia)
Call for paper

Special Issue on New Trends in Smart Sensor Systems
Guest editor, Takahiro Hayashi (Kansai University)
Call for paper

Copyright(C) MYU K.K.