Sensors and Materials

ISSN 0914-4935
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.

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ZnO Nanogenerator Prepared from ZnO Nanorods Grown by Hydrothermal Method

Chih-Cheng Chen, Tung-lung Wu, Teen-Hang Meen, Chao-Yang Chen, Che-Hsiang Su, Jenn-Kai Tsai, Chun-Ying Lee, Chun-Hsien Lee, and Day-Shan Liu

(Received November 23, 2018; Accepted December 27, 2018)

Keywords: ZnO, nanorods, nanogenerator, hydrothermal method

In this study, a zinc oxide (ZnO) film was deposited by sputtering on an indium tin oxide (ITO) glass substrate. ZnO nanorods were then grown on the film by the hydrothermal method, then assembled with a gold electrode to fabricate a nanogenerator. The ZnO nanostructure and nanogenerator were analyzed by field emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), and the measurement of current–voltage characteristics. The results of FE-SEM show that the length of the ZnO nanorods increased with the time of growth, and the optimal dimensions of the ZnO nanorods were a length of 2 μm and a diameter of 130 nm, growth time of 6 h. In the XRD pattern, ZnO (002) and (103) peaks were observed at 2θ=34.45 and 62.51o, respectively, confirming that the ZnO nanorods were grown on the substrate. The nanogenerator was driven by an ultrasonic wave to measure its voltage and current. The highest average current and voltage were 3.46×10-6 A and 5.63×10-2 V, respectively. These results indicate that the ZnO nanorods prepared by the hydrothermal method are suitable for the fabrication of a nanogenerator.

Corresponding author: Tung-lung Wu, Teen-Hang Meen