ISSN 0914-4935

Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

Guidelines
English    日本語

Template
English

General Notes on Format
English

Publisher
 MYU K.K.
 Sensors and Materials
 1-23-3-303 Sendagi,
 Bunkyo-ku, Tokyo 113-0022, Japan
 Tel: 81-3-3827-8549
 Fax: 81-3-3827-8547


MYU Research

(proofreading and recording)


MYU K.K.
(translation service)


The Art of Writing Scientific Papers

(How to write scientific papers)
(Japanese Only)

Copyright(C) MYU K.K. All Rights Reserved.

Design and Development of Fan-shaped Silicon Resonators for Young’s Modulus Measurement

Takahiro Namazu, Junki Kuroishi, Hiroya Yamagiwa, Daisuke Goto, Tatsuya Takeuchi, Kohei Murakami, Yasushi Kawashimo, and Tetsuo Takano

(Received July 22, 2018; Accepted November 1, 2018)

Keywords: single-crystal silicon, MEMS resonator, mechanical property measurement, Young’s modulus, resonant frequency

In this paper, the structural design and experiment of micro-electromechanical systems (MEMS) resonators for accurately measuring Young’s modulus is described. To establish an accurate measurement technique for the Young’s modulus of nanometer-thick thin films, first, we design MEMS resonators that can accurately derive the Young’s modulus of a structural material. The designed resonators are fan-shaped, which can vibrate sympathetically in-plane. In total, the shape and dimensions of eleven mechanical parts in a resonator are considered using finite element (FE) analyses, showing that the thickness-to-width ratio and the length of the rotation support beam affect the derivation of Young’s modulus. After device design, we fabricate the resonators made of single-crystal Si (SCS) using three different etching techniques: Bosch process deep reactive ion etching (DRIE), non-Bosch DRIE, and focused ion beam (FIB) etching. By using the resonators fabricated by non-Bosch DRIE and FIB etching, experimentally obtained Young’s moduli are comparable to FE-analyses-derived Young’s moduli. The resonators with a long rotation support beam and a large thickness-to-width ratio of the beam can provide Young’s moduli that are close to the ideal value. However, Young’s moduli obtained from the resonators fabricated by the Bosch process DRIE differ largely from FE-analyses-derived Young’s moduli. The sidewall effect is discussed in the light of the modal analyses by the FE method.

Corresponding author: Takahiro Namazu




Forthcoming Regular Issues


Forthcoming Special Issues

Special Issue on the 2016 & 2017 International Conference on Computing and Precision Engineering in Taiwan (2)
Guest editor, Cheng-Chi Wang (National Chin-Yi University of Technology)
Conference website


Special Issue on Nanostructure and Its Application in Sensors
Guest editor, Tie Li (Shanghai Institute of Microsystem and Information Technology)


Special Issue on Remote Sensing and Sensing Devices
Guest editor, Haruichi Kanaya (Kyushu University)


Special Issue on International Conference on BioSensors, BioElectronics, BioMedical Devices, BioMEMS/NEMS and Applications 2017 (Bio4Apps 2017)
Guest editor, Toshihiro Itoh (The University of Tokyo); Submission deadline, May 15, 2018
Conference website


Special Issue on Micro/Nano Sensing Platforms Exploring Biomedical Innovation
Guest editor, Ryoji Kurita (National Institute of Advanced Industrial Science and Technology)


Special Issue on Mechanical and Thermal Reliability of Micro/Nanomaterials
Guest editor, Takahiro Namazu (Aichi Institute of Technology) and Shugo Miyake (Kobe City College of Technology)
Call for paper


Special Issue on Universal Power Supply Technologies for Trillion Sensors Era
Guest editor, Keiji Takeuchi (NTT Data Institute of Management Consulting, Inc.)
Call for paper


Special Issue on the Workshop on Sensors and Applications for Fishery and Agricultural Industries
Guest editor, Masaaki Wada (Future University Hakodate) and Katsumori Hatanaka (Tokyo University of Agriculture); Submission deadline, October 12, 2018
Call for paper


Special Issue on Selected Papers from ICASI2018
Guest editor, Teen-Hang Meen (National Formosa University), Shoou-Jinn Chang National Cheng Kung University), and Stephen D. Prior (University of Southampton)
Conference website
Call for paper


Special Issue on Materials, Devices, Circuits, Analytical Methods for Various Sensors (Selected Papers from ICSEVEN 2018)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Chi-Chih Liao (II-V Epiworks, Inc.), and Ja-Hao Chen (Feng Chia University)
Conference website
Call for paper


Special Issue on Carbon Material-based Chemical and Biochemical Sensors
Guest editor, Yuko Ueno (NTT Basic Research Laboratories) and Osamu Niwa (Saitama Institute of Technology)
Call for paper


Special Issue on the International Multi-Conference on Engineering and Technology Innovation 2018 (IMETI2018)
Guest editor, Wen-Hsiang Hsieh (National Formosa University)
Conference website


Special Issue on Smart Connections and Intelligent Computation in IoT
Guest editor, Jia-Shing Sheu (National Taipei University of Education)
Call for paper


Special Issue on Advanced Nanofabrication Processes for Emerging Devices and Materials
Guest editor, Hiroyuki Akinaga (National Institute of Advanced Industrial Science and Technology, AIST)
Call for paper


Special Issue on Sensing, Interaction, and Fusion towards Smart Cities
Guest editor, Xuefeng Li (Tongji University)
Call for paper


Special Issue on Magnetic Sensors and Applications
Guest editor, Keiji Tsukada (Okayama University)
Call for paper


Special Issue on Sensors and Materials in Manufacturing
Guest editor, Ming Yan (Tokyo Metropolitan University) and Masao Murakawa (Nippon Institute of Technology)
Call for paper


Special Issue on Food-Sensing Technologies and Applications
Guest editor, Hiroyuki Nakamoto (Kobe University)
Call for paper


Special Issue on Smart Sensing Technology and Materials for Smart Industry and Environmental Applications
Guest editor, Somyot Kaitwanidvilai (King Mongkut’s Institute of Technology Ladkrabang)
Call for paper


Special Issue on Environmental Sensing
Guest editor, Hiroshi Aoki (National Institute of Advanced Industrial Science and Technology, AIST)
Call for paper


Special Issue on Remote Sensing and Geospatial Technologies for Sustainable Development
Guest editor, Dong Ha Lee and Tri Dev Acharya (Kangwon National University)
Call for paper



Copyright(C) MYU K.K. All Rights Reserved.