Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded
(Clarivate Analytics), Scopus
(Elsevier), and other databases.
Instructions to authors
Instructions for manuscript preparation
Sensors and Materials
Bunkyo-ku, Tokyo 113-0022, Japan
Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
(proofreading and recording)
The Art of Writing Scientific Papers
(How to write scientific papers)
Sensors and Materials, Volume 31, Number 3(1) (2019)
Copyright(C) MYU K.K. All Rights Reserved.
Published: March 8, 2019
Design and Development of Fan-shaped Silicon Resonators for Young’s Modulus Measurement [PDF]
Takahiro Namazu, Junki Kuroishi, Hiroya Yamagiwa, Daisuke Goto, Tatsuya Takeuchi, Kohei Murakami, Yasushi Kawashimo, and Tetsuo Takano
(Received July 22, 2018; Accepted November 1, 2018)
Keywords: single-crystal silicon, MEMS resonator, mechanical property measurement, Young’s modulus, resonant frequency
In this paper, the structural design and experiment of MEMS resonators for accurately measuring Young’s modulus is described. To establish an accurate measurement technique for the Young’s modulus of nanometer-thick thin films, first, we design MEMS resonators that can accurately derive the Young’s modulus of a structural material. The designed resonators are fan-shaped and can vibrate sympathetically in-plane. In total, the shape and dimensions of eleven mechanical parts in a resonator are considered using finite element (FE) analyses, and it is shown that the thickness-to-width ratio and the length of the rotation support beam affect the derivation of Young’s modulus. After device design, we fabricate the resonators made of single-crystal Si (SCS) using three different etching techniques: Bosch process deep reactive ion etching (DRIE), non-Bosch DRIE, and focused ion beam (FIB) etching. When the resonators fabricated by non-Bosch DRIE and FIB etching are used, experimentally obtained Young’s moduli are comparable to FE-analyses-derived Young’s moduli. The resonators with a long rotation support beam and a large thickness-to-width ratio of the beam can provide Young’s moduli that are close to the ideal value. However, Young’s moduli obtained from the resonators fabricated by the Bosch process DRIE differ largely from FE-analyses-derived Young’s moduli. The sidewall effect is discussed in the light of the modal analyses by the FE method.
Corresponding author: Takahiro Namazu
This work is licensed under a Creative Commons Attribution 4.0 International License.
Cite this article
Takahiro Namazu, Junki Kuroishi, Hiroya Yamagiwa, Daisuke Goto, Tatsuya Takeuchi, Kohei Murakami, Yasushi Kawashimo, and Tetsuo Takano, Design and Development of Fan-shaped Silicon Resonators for Young’s Modulus Measurement, Sens. Mater., Vol. 31, No. 3, 2019, p. 697-711.
Forthcoming Regular Issues
Forthcoming Special Issues
Special Issue on the Workshop on Sensors and Applications for Fishery and Agricultural Industries
Guest editor, Masaaki Wada (Future University Hakodate) and Katsumori Hatanaka (Tokyo University of Agriculture)Special Issue on Selected Papers from ICASI2018 (3)
Guest editor, Teen-Hang Meen (National Formosa University), Shoou-Jinn Chang National Cheng Kung University), and Stephen D. Prior (University of Southampton)Conference websiteSpecial Issue on Carbon Material-based Chemical and Biochemical Sensors
Guest editor, Yuko Ueno (NTT Basic Research Laboratories) and Osamu Niwa (Saitama Institute of Technology)Special Issue on Materials, Devices, Circuits, Analytical Methods for Various Sensors (Selected Papers from ICSEVEN 2018) (2)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Chi-Chih Liao (II-V Epiworks, Inc.), and Ja-Hao Chen (Feng Chia University)Conference website5th Special Issue on the Workshop of Next-generation Front-edge Optical Science Research
Guest editor, Hidehito Nanto (Kanazawa Institute of Technology) and Takayuki Yanagida (Nara Institute of Science and Technology)Special Issue on Universal Power Supply Technologies for Trillion Sensors Era
Guest editor, Keiji Takeuchi (NTT Data Institute of Management Consulting, Inc.)Call for paperSpecial Issue on the International Multi-Conference on Engineering and Technology Innovation 2018 (IMETI2018)
Guest editor, Wen-Hsiang Hsieh (National Formosa University)Conference websiteSpecial Issue on Advanced Nanofabrication Processes for Emerging Devices and Materials
Guest editor, Hiroyuki Akinaga (National Institute of Advanced Industrial Science and Technology, AIST)Call for paperSpecial Issue on Sensing, Interaction, and Fusion towards Smart Cities
Guest editor, Xuefeng Li (Tongji University)Call for paperSpecial Issue on Magnetic Sensors and Applications
Guest editor, Keiji Tsukada (Okayama University)Call for paperSpecial Issue on Smart Connections and Intelligent Computation in IoT
Guest editor, Jia-Shing Sheu (National Taipei University of Education)Call for paperSpecial Issue on Sensors and Materials in Manufacturing
Guest editor, Ming Yan (Tokyo Metropolitan University) and Masao Murakawa (Nippon Institute of Technology)Call for paperSpecial Issue on Food-Sensing Technologies and Applications
Guest editor, Hiroyuki Nakamoto (Kobe University)Call for paperSpecial Issue on CMOS-driven Biomedical Innovations
Guest editor, Kiichi Niitsu (Nagoya University)Call for paperSpecial Issue on New Trend of Robotics and Applications
Guest editor, Ikuo Yamamoto (Nagasaki University)Call for paperSpecial Issue on Smart Sensing Technology and Materials for Smart Industry and Environmental Applications
Guest editor, Somyot Kaitwanidvilai (King Mongkut’s Institute of Technology Ladkrabang)Call for paperSpecial Issue on Environmental Sensing
Guest editor, Hiroshi Aoki (National Institute of Advanced Industrial Science and Technology, AIST)Call for paperSpecial Issue on Sensor Fusion and Environment Perception for Autonomous Systems
Guest editor, Chenguang Yang (University of the West of England, Bristol)Call for paperSpecial Issue on Remote Sensing and Geospatial Technologies for Sustainable Development
Guest editor, Dong Ha Lee and Tri Dev Acharya (Kangwon National University)Call for paperSpecial Issue on International Conference on BioSensors, BioElectronics, BioMedical Devices, BioMEMS/NEMS and Applications 2017 (Bio4Apps 2017)
Guest editor, Xiaojun Han (Harbin Institute of Technology)Conference websiteSpecial Issue on Selected Papers from ICKII2019
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Cheng-Fu Yang (National University of Kaohsiung)Conference websiteCall for paperSpecial Issue on Advanced Micro and Nanomaterials for various Sensor Applications (Selected Papers from ICASI 2019)
Guest editor, Sheng-Joue Young (National Formosa University), Shoou-Jinn Chang (National Cheng Kung University), Liang-Wen Ji (National Formosa University), and Yu-Jen Hsiao (Southern Taiwan University of Science and Technology)Conference websiteCall for paperSpecial Issue on Innovation in Smart Sensing Control, Metrology, Optimization and Intelligent Automation
Guest editor, Cheng-Chi Wang (National Chin-Yi University of Technology)Conference websiteCall for paperSpecial Issue on Materials, Devices, Circuits, Analytical Methods for Various Sensors (Selected Papers from ICSEVEN 2019)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Cheng-Hsing Hsu (National United University), Ja-Hao Chen (Feng Chia University), and Wei-Ling Hsu (Huaiyin Normal University)Conference websiteCall for paperSpecial Issue on Biological Odor Sensing System and Their Applications
Guest editor, Takeshi Sakurai (Tokyo University of Agriculture)Call for paperSpecial Issue on Software, Algorithms, and Applications Using Sensors and Networks
Guest editor, Yoshito Tobe (Aoyama Gakuin University)Call for paperSpecial Issue on Novel Sensing Technologies for Point of Care, Home Care, and Personal Health Care
Guest editor, Yu-Lin Wang (National Tsing Hua University)Call for paper