ISSN 0914-4935

Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Effect of Annealing Temperature on Optical and Electrical Properties of ZnO/Ag/ZnO Multilayer Films for Photosensor

Tao-Hsing Chen and Hao-De Su

(Received March 28, 2018; Accepted August 22, 2018)

Keywords: ZnO/Mo/ZnO multilayer film, sputtering, annealing temperature, optical and electrical properties

In this study transparent thin films of ZnO/Ag/ZnO were deposited on Corning glass substrates by radio-frequency (RF) magnetron sputtering and the effect of different annealing temperatures on the transmittance, electrical, and crystalline properties of the grown films was investigated. The results showed that the multilayered films exhibited transmittance of approximately 80% at an annealing temperature of 300 ºC. The resistivity (3.95×10-5 Ω-cm) was also the lowest at 450 ºC, mobility was 14.7 cm2/V-s, and carrier concentration was 5.75×1021 cm-3. The experiments showed that as the annealing temperature was raised, the transmittance increased. After 450 ºC, the transmittance decreased. However, resistivity continued to drop with further increase of temperature, accompanied by a growth in crystal grain size.

Corresponding author: Tao-Hsing Chen




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