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Sensors and Materials
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Sensors and Materials, Volume 30, Number 12(3) (2018)
Copyright(C) MYU K.K.
pp. 2999-3007
S&M1736 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2018.2033
Published: December 28, 2018

Flexible Contact Pressure Sensor based on Ultrathin Piezoresistive Silicon Membrane Capable of Strain Compensation [PDF]

Yusuke Takei, Shintaro Goto, Seiichi Takamatsu, Toshihiro Itoh, and Takeshi Kobayashi

(Received June 26, 2018; Accepted October 22, 2018)

Keywords: pressure sensor, strain sensor, ultrathin silicon, piezoresistive silicon membrane, flexible device

In this study, we developed a highly sensitive and flexible contact pressure sensor by transferring an ultrathin piezoresistive silicon membrane to a flexible substrate. The sensor consists of two sensors, a contact pressure sensor and a strain sensor for strain compensation. From the output of these two sensors, strain caused by fixing the sensor to the curved surface can be compensated for, so that we can accurately measure contact pressure. In the experiments, we confirmed that the fabricated contact pressure sensor has the same sensitivity on both a flat surface and a curved surface. We also confirmed that our sensor can correctly measure contact pressure by compensating for the distortion when fixed to a curved surface.

Corresponding author: Yusuke Takei


Cite this article
Yusuke Takei, Shintaro Goto, Seiichi Takamatsu, Toshihiro Itoh, and Takeshi Kobayashi, Flexible Contact Pressure Sensor based on Ultrathin Piezoresistive Silicon Membrane Capable of Strain Compensation, Sens. Mater., Vol. 30, No. 12, 2018, p. 2999-3007.



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