ISSN 0914-4935

Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Flexible Contact Pressure Sensor based on Ultrathin Piezoresistive Silicon Membrane Capable of Strain Compensation

Yusuke Takei, Shintaro Goto, Seiichi Takamatsu, Toshihiro Itoh, and Takeshi Kobayashi

(Received June 26, 2018; Accepted October 22, 2018)

Keywords: pressure sensor, strain sensor, ultrathin silicon, piezoresistive, flexible device

In this study, we developed a highly sensitive and flexible contact pressure sensor by transferring an ultrathin piezoresistive silicon membrane to a flexible substrate. The sensor consists of two sensors, a contact pressure sensor and a strain sensor for strain compensation. From the output of these two sensors, strain caused by fixing the sensor to the curved surface can be compensated, so that we can measure accurate contact pressure. In the experiments, we confirmed that the fabricated contact pressure sensor had the same sensitivity on both a flat surface and a curved surface. We also confirmed that our sensor can measure the correct contact pressure by compensating the distortion when fixed to a curved surface.

Corresponding author: Yusuke Takei




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