ISSN 0914-4935

Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

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Design, Analysis and Experimental Results of Micromachined Single Structure Triaxis Vibratory Gyroscope with Advanced Coupling Mechanism

Seyeong Seok, Sanghee Moon, and Geunbae Lim

(Received June 7, 2018; Accepted July 17, 2018)

Keywords: MEMS, gyroscope, simulation, prototype development

In this work, a novel micromachined monolithic triaxis gyroscope with advanced anchor mechanism is designed and its structural characteristics are analyzed. Micromachined gyroscopes are usually packed in small packages, causing a high squeeze film damping effect that reduces the quality factor of out-of-plane vibration, resulting in lowered out-of-plane sensitivity. The proposed gyroscope has a four-mass single structure wherein the opposing masses vibrate in the opposite direction perpendicular to the direction they face, with the help of ‘tree-shaped’ coupling springs. The simulated driving and x-, y-, z-axis sensing resonance frequencies are 19946, 20227, 20294, and 20361 Hz, respectively. Also, the prototype of the gyroscope was fabricated and tested. It showed a driving Q-factor of 106 and scale factor of 7 mV/deg/s.

Corresponding author: Geunbae Lim




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