Vibration Measurement and Suppression for Laser Galvanometers Using a Micro-electromechanical System-based Accelerometer
Yu-Liang Hsu, Po-Huan Chou, Shih-Chin Yang, Hsing-Cheng Chang, Yu-Chen Kuo, Li-Feng Chiu, and Yu-Tai Chen
(Received January 18, 2018; Accepted July 3, 2018)
Keywords: galvanometer, MEMS-based accelerometer, vibration analysis, analog comb filter, vibration suppression
In this study, we develop a vibration measurement, analysis, and suppression system for laser galvanometers. A galvanometer control system integrates a notebook computer, an intelligent motion control platform (IMP-2), a servo driver circuit, and a galvanometer driver module for driving laser galvanometers. The proposed vibration measurement, analysis, and suppression system composed of a micro-electromechanical system (MEMS) piezoelectric accelerometer, the fast Fourier transformation (FFT) algorithm operated on a notebook computer, and an analog comb filter circuit is utilized to measure, analyze, and suppress vibrations generated from the mirror-installed galvanometer motors during rotation motions, respectively. First, we use the MEMS-based accelerometer to measure and record the vibration signals resulting from the mirror-installed galvanometer motors during rotation motions. Second, the frequency spectrum analysis of vibration acceleration signals has been carried out using the FFT algorithm. Subsequently, an efficient analog comb filter is designed on the basis of the appeared harmonic or resonance frequencies for suppressing the galvanometer vibrations. Finally, the experimental results have successfully validated that the proposed inertial-sensing-based vibration measurement, analysis, and suppression system can measure and analyze the galvanometer vibrations, and suppress them effectively for improving the accuracy and stability of the laser galvanometer scanning systems.
Corresponding author: Yu-Liang Hsu