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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials, Volume 30, Number 9(2) (2018)
Copyright(C) MYU K.K.
pp. 2125-2142
S&M1664 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2018.1960
Published: September 28, 2018

Role of Preferential Crystallographic Orientation in Piezoresistance Anisotropy for Cubic Polycrystalline Aggregates [PDF]

Taeko Ando and Toshiyuki Toriyama

(Received April 6, 2018; Accepted August 3, 2018)

Keywords: piezoresistance, polycrystalline aggregates, cubic anisotropy, preferential crystallographic orientation, crystallite orientation distribution function

We derived an overall piezoresistance tensor for polycrystalline aggregates having an orthotropic texture using the crystallite orientation distribution function (CODF) and the cubic single-crystal piezoresistance tensor. We found that the deviatoric part of the overall piezoresistance tensor has a functional dependence on the preferential crystallographic orientation of cubic single crystals and that the tensor has three independent components. The physical properties of the tensor are invariant under the choice of the CODF. We applied the CODF defined by Roe to calculate the tensor for a fiber texture. Furthermore, we compared the experimental results for the piezoresistance of polysilicon with our theoretical analysis results. The experimental results indicate that the variation in texture strength plays a major role in representing the piezoresistance anisotropy of polycrystalline aggregates.

Corresponding author: Taeko Ando


Cite this article
Taeko Ando and Toshiyuki Toriyama, Role of Preferential Crystallographic Orientation in Piezoresistance Anisotropy for Cubic Polycrystalline Aggregates, Sens. Mater., Vol. 30, No. 9, 2018, p. 2125-2142.



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