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Vol. 32, No. 8(2), S&M2292

ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials, Volume 30, Number 5(2) (2018)
Copyright(C) MYU K.K.
pp. 1081-1090
S&M1565 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2018.1716
Published: May 31, 2018

Miniaturization of MEMS Capacitive Accelerometers Fabricated Using Silicon-on-insulator-MEMS Technology [PDF]

Jiannan Liu and Hideo Muro

(Received July 31, 2017; Accepted November 16, 2017)

Keywords: miniaturization, capacitive, beam configuration, sensitivity, resonant frequency

In our previous work, we studied capacitive micro-accelerometers fabricated using a simple silicon-on-insulator (SOI)-MEMS technology, studied the feasibility of an accelerometer with a beam length as long as the side length of the proof mass. This paper investigates the dependences of their sensitivities and resonant frequencies on the beam parameter and its configuration, and studies the method of designing the stuctures of capactive accelerometers with beam lengths as long as the side length of the proof mass for miniaturizing the device.

Corresponding author: Liu Jiannan


Cite this article
Jiannan Liu and Hideo Muro, Miniaturization of MEMS Capacitive Accelerometers Fabricated Using Silicon-on-insulator-MEMS Technology, Sens. Mater., Vol. 30, No. 5, 2018, p. 1081-1090.



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