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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 29, Number 6(2) (2017)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 817-826
S&M1370 Research Paper of Special Issue https://doi.org/10.18494/SAM.2017.1476 Published: June 21, 2017 Modification Processes for Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation [PDF] Kazuhiro Kanda, Ryo Imai, Masahito Niibe, Hisashi Yoshioka, Keishi Komatsu, and Hidetoshi Saitoh (Received September 23, 2016; Accepted December 26, 2016) Keywords: diamond-like carbon, hydrogen desorption, soft X-ray, film modification, NEXAFS
We investigated a modification process for highly hydrogenated diamond-like carbon (H-DLC) film using exposure to synchrotron radiation (SR) in the soft X-ray region by measuring the dependence of various film properties and structural properties on the SR dose. Noticeable changes in the film volume and optical constants were observed, and the local structures of the H-DLC film changed due to SR exposure. These changes are ascribable to the desorption of hydrogen from the film, which is much faster than when the film is etched.
Corresponding author: Kazuhiro Kanda Cite this article Kazuhiro Kanda, Ryo Imai, Masahito Niibe, Hisashi Yoshioka, Keishi Komatsu, and Hidetoshi Saitoh, Modification Processes for Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation, Sens. Mater., Vol. 29, No. 6, 2017, p. 817-826. |
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