pp. 35-56
S&M665 Research Paper of Special Issue Published: 2007 Designing and Fabricating Electromagnetically Actuated Microvalves for MEMS Applications [PDF] J. Sutanto, R. Luharuka, P. J. Hesketh and Y. H. Berthelot (Received May 25, 2006; Accepted February 2, 2007) Keywords: microvalve, electroplating
This paper reviews our work on microfabricated miniature electromagnetic microvalves. Three different designs are presented: on/off, mechanically bistable, and rotational microvalves. This paper concentrates in the design, modeling/simulation, and the fabrica-tion of different types of electromagnetic microvalves. The challenges in the fabrication of permanent magnets directly on the valve’s membrane structure to produce bistable tech-niques are also presented.
Corresponding author: P. J. HeskethCite this article J. Sutanto, R. Luharuka, P. J. Hesketh and Y. H. Berthelot, Designing and Fabricating Electromagnetically Actuated Microvalves for MEMS Applications, Sens. Mater., Vol. 19, No. 1, 2007, p. 35-56. |