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Vol. 34, No. 8(3), S&M3042

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Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Sensors and Materials, Volume 16, Number 7 (2004)
Copyright(C) MYU K.K.
pp. 345-356
S&M571 Research Paper in Biosensors and Related Areas
Published: 2004

Measurement of Gas Moisture in the ppm Range Using Porous Silicon and Porous Alumina Sensors [PDF]

Tarikul Islam, Kalyan Kumar Mistry, Kamalendu Sengupta and Hiranmay Saha

(Received May 12, 2004; Accepted September 3, 2004)

Keywords: moisture sensor, ppm level moisture, porous silicon, porous alumina, sensor capacitance detection electronics

This paper reports the performance of a porous silicon (PS) sensor for detecting ppm level moisture and compares its relative performance with that of porous alumina (PA) sensors. The porous alumina sensor is fabricated by the sol-gel technique. It is found experimentally that in measuring ppm level moisture the sensitivity of the PA sensor appears to be greater than that of the PS sensor while the response time of the PS sensor is much shorter than that of the PA sensor. A simple but precise technique for the electronic measurement of sensor capacitance, which minimizes the parasitic earth capacitances, has been developed to study the response of both PS and PA gas moisture sensors. The detection electronics can be utilized for an integrated sensor unit. However, initial characterizations of both PS/PA sensors are carried out using a standard LCR meter (HP-4284A) to establish the electronic circuit.

Corresponding author: Hiranmay Saha, Tarikul Islam


Cite this article
Tarikul Islam, Kalyan Kumar Mistry, Kamalendu Sengupta and Hiranmay Saha, Measurement of Gas Moisture in the ppm Range Using Porous Silicon and Porous Alumina Sensors, Sens. Mater., Vol. 16, No. 7, 2004, p. 345-356.



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