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Vol. 34, No. 8(3), S&M3042

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Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Sensors and Materials, Volume 16, Number 3 (2004)
Copyright(C) MYU K.K.
pp. 109-117
S&M551 Research Paper
Published: 2004

A Highly Sensitive Capacitive-Type Humidity Sensor Using Customized Polyimide Film without Hydrophobic Elements [PDF]

Yong-Ho Kim, Yong-Jun Kim, Jun-Young Lee, Jung-Hyun Kim and Kyu-Ho Shin

(Received December 18, 2003; Accepted April 27, 2004)

Keywords: capacitive humidity sensor, customized polyimide film, hydrophobic, micropackage

In this paper, we report the design, fabrication and measurement results of a highly sensitive capacitive-type humidity sensor using a customized polyimide film without hydrophobic elements for evaluating the hermeticity of micropackages. For higher sensitivity, a customized polyimide film as a moisture-absorbing layer is applied instead of using general polyimide films for microelectronic applications. The polyimide film is obtained by synthesizing polyamic acid composed of m-pyromellitic dianhydride, phenylenediamine and dimethylacetamide followed by thermal polymerization. An assembly of the humidity sensor and a micropackage which is realized with localized heating and bonding with a polysilicon heater is also fabricated to verify packaging compatibility. Characteristics of the sensor which include sensitivity, hysteresis and stability are measured. The measurement results show a percent normalized capacitance change of 37.45/%RH, hysteresis of 0.77% over a range from 10 to 90%RH and stability of 0.25% maximum drift from the average value at 50%RH for 120 min. According to these results, it is expected that the proposed humidity sensor can be applied to evaluate the hermeticity of micropackages.

Corresponding author: Yong-Ho Kim


Cite this article
Yong-Ho Kim, Yong-Jun Kim, Jun-Young Lee, Jung-Hyun Kim and Kyu-Ho Shin, A Highly Sensitive Capacitive-Type Humidity Sensor Using Customized Polyimide Film without Hydrophobic Elements, Sens. Mater., Vol. 16, No. 3, 2004, p. 109-117.



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