pp. 285-292
S&M449 Research Paper of Special Issue Published: 2001 Change in Orientation-Dependent Etching Properties of Single-Crystal Silicon Caused by a Surfactant Added to TMAH Solution [PDF] Kazuo Sato, Daisuke Uchikawa and Mitsuhiro Shikida Cite this article Kazuo Sato, Daisuke Uchikawa and Mitsuhiro Shikida, Change in Orientation-Dependent Etching Properties of Single-Crystal Silicon Caused by a Surfactant Added to TMAH Solution, Sens. Mater., Vol. 13, No. 5, 2001, p. 285-292. |