pp. 383-392
S&M381 Research Paper of Special Issue Published: 1999 Fabrication and Study of a Shallow-Gap Pirani Vacuum Sensor with a Linearly Measurable Atmospheric Pressure Range [PDF] Bruce C. S. Chou, Chung-Nan Chen and Jin-Shown Shie Cite this article Bruce C. S. Chou, Chung-Nan Chen and Jin-Shown Shie, Fabrication and Study of a Shallow-Gap Pirani Vacuum Sensor with a Linearly Measurable Atmospheric Pressure Range, Sens. Mater., Vol. 11, No. 6, 1999, p. 383-392. |