pp. 121-130
S&M194 Research Paper Published: 1995 Influence of Annealing on Elastic Properties of LPCVD Silicon Nitride and LPCVD Polysilicon [PDF] Dieter Maier-Schneider, Aylin Ersoy, Jürgen Maibach, Dieter Schneider and Ernst Obermeier Cite this article Dieter Maier-Schneider, Aylin Ersoy, Jürgen Maibach, Dieter Schneider and Ernst Obermeier, Influence of Annealing on Elastic Properties of LPCVD Silicon Nitride and LPCVD Polysilicon, Sens. Mater., Vol. 7, No. 2, 1995, p. 121-130. |