pp. 105-110
S&M192 Letter Published: 1995 Micromechanical Mach-Zehnder Interferometer Compatible with Silicon Integrated Circuit and Micromachining Technologies [PDF] Arokia Nathan, Yashraj K. Bhatnagar, Kamel Benaissa and Weiping Huang Cite this article Arokia Nathan, Yashraj K. Bhatnagar, Kamel Benaissa and Weiping Huang, Micromechanical Mach-Zehnder Interferometer Compatible with Silicon Integrated Circuit and Micromachining Technologies, Sens. Mater., Vol. 7, No. 2, 1995, p. 105-110. |