pp. 239-250
S&M115 Research Paper of Special Issue Published: 1992 Measurement of Young's Modulus, Residual Stress, and Air Damping Effect Using Silicon Microstructures [PDF] Hiroyuki Okada, Kenichiro Suzuki and Toshihide Kuriyama Cite this article Hiroyuki Okada, Kenichiro Suzuki and Toshihide Kuriyama, Measurement of Young's Modulus, Residual Stress, and Air Damping Effect Using Silicon Microstructures, Sens. Mater., Vol. 4, No. 5, 1992, p. 239-250. |