pp. 197-206
S&M50 Research Paper Published: 1990 Electrothermal Microactuators in Standard CMOS [PDF] Lj. Ristic, M. Parameswaran, A. M. Robinson, K. Chau and W. Allegretto Cite this article Lj. Ristic, M. Parameswaran, A. M. Robinson, K. Chau and W. Allegretto, Electrothermal Microactuators in Standard CMOS, Sens. Mater., Vol. 2, No. 4, 1990, p. 197-206. |