Sensors and Materials
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Sensors and Materials  ISSN 0914-4935

Volume 22 (2010)
Number 2


Research Reports

S&M0789
Atomic Oxygen Sensing Using a Quartz Crystal Microbalance with a Polymer Thin Film Prepared by RF Sputtering
Hiroyuki Matsumoto, Mikihiko Matsuoka, Satoru Iwamori and Kazutoshi Noda
pp. 61-70


S&M0790
Solid Internal Energy Dissipation of 3C Single-Crystal Silicon Carbide Micromechanical Resonators by Heterojunction Growth on Silicon
Wenteng Chang
pp. 71-83


S&M0791
Innovative Composite PDMS Micropump with Electromagnetic Drive
Che-Yi Shen and Hsien-Kuang Liu
pp. 85-100



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