Sensors and Materials
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Sensors and Materials  ISSN 0914-4935

Volume 22 (2010)
Number 1

Special Issue on Evaluation Methods for Material Properties of MEMS/NEMS Devices
Guest Editor, Kuniki Ohwada (Teikyo University)


Research Reports

S&M0784
Tensile Testing of Single-Crystal Silicon Thin Films at 600 oC Using Infrared Radiation Heating
Toshiyuki Tsuchiya, Tetsuro Ikeda, Akifumi Tsunematsu, Koji Sugano and Osamu Tabata
pp. 1-11


S&M0785
Tensile and Creep Characteristics of Sputtered Gold-Tin Eutectic Solder Film Evaluated by XRD Tensile Testing
Takahiro Namazu, Hideki Takemoto and Shozo Inoue
pp. 13-24


S&M0786
Effect of Specimen Shape on Test Results of Au Freestanding Film Measured by Strip Bending Method
Jungmin Park, Jae-Hyun Kim, Sang-Joo Lee, Bongkyun Jang, Bung-Ik Choi and Hak-Joo Lee
pp. 25-37


S&M0787
Development of Amplitude-Controlled Parallel-Fatigue-Test System for Micro-Electromechanical Resonators
Tsuyoshi Ikehara and Toshiyuki Tsuchiya
pp. 39-50


S&M0788
Resonant Bending Fatigue Tests on Thin Films
Kwangsik Kwak, Masaaki Otsu and Kazuki Takashima
pp. 51-59

 


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